8/19/2011	10:50:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2011	10:50:38 AM	Recipe started at 10:50 AM
8/19/2011	10:50:38 AM	Helium valve closed
8/19/2011	10:50:38 AM	H2 valve closed
8/19/2011	10:50:38 AM	BCl3 valve closed
8/19/2011	10:50:38 AM	PH3 valve closed
8/19/2011	10:50:38 AM	SiCl4 pre valve closed
8/19/2011	10:50:38 AM	SiCl4 post valve closed
8/19/2011	10:50:38 AM	Main Vac valve closed
8/19/2011	10:50:38 AM	Bypass valve closed
8/19/2011	10:50:38 AM	Bubbler valve closed
8/19/2011	10:50:38 AM	Helium MFC set to  0.000000
8/19/2011	10:50:38 AM	H2 MFC set to  0.000000
8/19/2011	10:50:38 AM	BCl3 MFC set to  0.000000
8/19/2011	10:50:38 AM	PHl3 MFC set to  0.000000
8/19/2011	10:50:38 AM	SiCl4 MFC set to  0.000000
8/19/2011	10:50:38 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	10:50:38 AM	Tube furnace set to 0
8/19/2011	10:50:41 AM	H2 valve closed
8/19/2011	10:50:41 AM	BCl3 valve closed
8/19/2011	10:50:41 AM	PH3 valve closed
8/19/2011	10:50:41 AM	SiCl4 pre valve closed
8/19/2011	10:50:41 AM	SiCl4 post valve closed
8/19/2011	10:50:41 AM	Main Vac valve closed
8/19/2011	10:50:41 AM	Bypass valve closed
8/19/2011	10:50:41 AM	Bubbler valve closed
8/19/2011	10:50:41 AM	Helium valve opened
8/19/2011	10:50:41 AM	Helium MFC set to  500.000000
8/19/2011	10:50:41 AM	H2 MFC set to  0.000000
8/19/2011	10:50:41 AM	BCl3 MFC set to  0.000000
8/19/2011	10:50:41 AM	PHl3 MFC set to  0.000000
8/19/2011	10:50:41 AM	SiCl4 MFC set to  0.000000
8/19/2011	10:50:41 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	10:50:41 AM	Tube furnace set to 0
8/19/2011	10:51:46 AM	Helium valve closed
8/19/2011	10:51:46 AM	H2 valve closed
8/19/2011	10:51:46 AM	BCl3 valve closed
8/19/2011	10:51:46 AM	PH3 valve closed
8/19/2011	10:51:46 AM	SiCl4 pre valve closed
8/19/2011	10:51:46 AM	SiCl4 post valve closed
8/19/2011	10:51:46 AM	Main Vac valve closed
8/19/2011	10:51:46 AM	Bypass valve closed
8/19/2011	10:51:46 AM	Bubbler valve closed
8/19/2011	10:51:46 AM	Helium MFC set to  0.000000
8/19/2011	10:51:46 AM	H2 MFC set to  0.000000
8/19/2011	10:51:46 AM	BCl3 MFC set to  0.000000
8/19/2011	10:51:46 AM	PHl3 MFC set to  0.000000
8/19/2011	10:51:46 AM	SiCl4 MFC set to  0.000000
8/19/2011	10:51:46 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	10:51:46 AM	Tube furnace set to 0
8/19/2011	10:51:47 AM	Run finished at 10:51 AM
8/19/2011	10:51:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2011	10:58:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2011	10:58:34 AM	Recipe started at 10:58 AM
8/19/2011	10:58:34 AM	Helium valve closed
8/19/2011	10:58:34 AM	H2 valve closed
8/19/2011	10:58:34 AM	BCl3 valve closed
8/19/2011	10:58:34 AM	PH3 valve closed
8/19/2011	10:58:34 AM	SiCl4 pre valve closed
8/19/2011	10:58:34 AM	SiCl4 post valve closed
8/19/2011	10:58:34 AM	Main Vac valve closed
8/19/2011	10:58:34 AM	Bubbler valve closed
8/19/2011	10:58:34 AM	Bypass valve opened
8/19/2011	10:58:34 AM	Helium MFC set to  0.000000
8/19/2011	10:58:34 AM	H2 MFC set to  0.000000
8/19/2011	10:58:34 AM	BCl3 MFC set to  0.000000
8/19/2011	10:58:34 AM	PHl3 MFC set to  0.000000
8/19/2011	10:58:34 AM	SiCl4 MFC set to  0.000000
8/19/2011	10:58:34 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	10:58:34 AM	Tube furnace set to 0
8/19/2011	10:59:42 AM	Helium valve closed
8/19/2011	10:59:42 AM	H2 valve closed
8/19/2011	10:59:42 AM	BCl3 valve closed
8/19/2011	10:59:42 AM	PH3 valve closed
8/19/2011	10:59:42 AM	SiCl4 pre valve closed
8/19/2011	10:59:42 AM	SiCl4 post valve closed
8/19/2011	10:59:42 AM	Main Vac valve closed
8/19/2011	10:59:42 AM	Bubbler valve closed
8/19/2011	10:59:42 AM	Bypass valve opened
8/19/2011	10:59:42 AM	Helium MFC set to  0.000000
8/19/2011	10:59:42 AM	H2 MFC set to  0.000000
8/19/2011	10:59:42 AM	BCl3 MFC set to  0.000000
8/19/2011	10:59:42 AM	PHl3 MFC set to  0.000000
8/19/2011	10:59:42 AM	SiCl4 MFC set to  0.000000
8/19/2011	10:59:42 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	10:59:42 AM	Tube furnace set to 0
8/19/2011	11:00:42 AM	Helium valve closed
8/19/2011	11:00:42 AM	H2 valve closed
8/19/2011	11:00:42 AM	BCl3 valve closed
8/19/2011	11:00:42 AM	PH3 valve closed
8/19/2011	11:00:42 AM	SiCl4 pre valve closed
8/19/2011	11:00:42 AM	SiCl4 post valve closed
8/19/2011	11:00:42 AM	Bypass valve closed
8/19/2011	11:00:42 AM	Bubbler valve closed
8/19/2011	11:00:42 AM	Main Vac valve opened
8/19/2011	11:00:42 AM	Helium MFC set to  0.000000
8/19/2011	11:00:42 AM	H2 MFC set to  0.000000
8/19/2011	11:00:42 AM	BCl3 MFC set to  0.000000
8/19/2011	11:00:42 AM	PHl3 MFC set to  0.000000
8/19/2011	11:00:42 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:00:42 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:00:42 AM	Tube furnace set to 0
8/19/2011	11:00:43 AM	Run finished at 11:00 AM
8/19/2011	11:00:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2011	11:01:26 AM	Helium MFC set to  20.000000
8/19/2011	11:01:29 AM	Helium valve opened
8/19/2011	11:01:47 AM	Helium valve closed
8/19/2011	11:02:30 AM	Helium MFC set to  20.000000
8/19/2011	11:02:31 AM	Helium valve opened
8/19/2011	11:03:43 AM	Helium valve closed
8/19/2011	11:04:05 AM	Helium valve opened
8/19/2011	11:08:09 AM	Helium valve closed
8/19/2011	11:08:12 AM	Helium MFC set to  0.000000
8/19/2011	11:08:33 AM	Recipe started at 11:08 AM
8/19/2011	11:08:33 AM	Helium valve closed
8/19/2011	11:08:33 AM	H2 valve closed
8/19/2011	11:08:33 AM	BCl3 valve closed
8/19/2011	11:08:33 AM	PH3 valve closed
8/19/2011	11:08:33 AM	SiCl4 pre valve closed
8/19/2011	11:08:33 AM	SiCl4 post valve closed
8/19/2011	11:08:33 AM	Bypass valve closed
8/19/2011	11:08:33 AM	Bubbler valve closed
8/19/2011	11:08:33 AM	Main Vac valve opened
8/19/2011	11:08:33 AM	Helium MFC set to  0.000000
8/19/2011	11:08:33 AM	H2 MFC set to  0.000000
8/19/2011	11:08:33 AM	BCl3 MFC set to  0.000000
8/19/2011	11:08:33 AM	PHl3 MFC set to  0.000000
8/19/2011	11:08:33 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:08:33 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:08:33 AM	Tube furnace set to 150
8/19/2011	11:09:03 AM	H2 valve closed
8/19/2011	11:09:03 AM	BCl3 valve closed
8/19/2011	11:09:03 AM	PH3 valve closed
8/19/2011	11:09:03 AM	SiCl4 pre valve closed
8/19/2011	11:09:03 AM	SiCl4 post valve closed
8/19/2011	11:09:03 AM	Bypass valve closed
8/19/2011	11:09:03 AM	Bubbler valve closed
8/19/2011	11:09:03 AM	Helium valve opened
8/19/2011	11:09:03 AM	Main Vac valve opened
8/19/2011	11:09:03 AM	Helium MFC set to  20.000000
8/19/2011	11:09:03 AM	H2 MFC set to  0.000000
8/19/2011	11:09:03 AM	BCl3 MFC set to  0.000000
8/19/2011	11:09:03 AM	PHl3 MFC set to  0.000000
8/19/2011	11:09:03 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:09:03 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:09:03 AM	Tube furnace set to 150
8/19/2011	11:09:33 AM	Helium valve closed
8/19/2011	11:09:33 AM	H2 valve closed
8/19/2011	11:09:33 AM	BCl3 valve closed
8/19/2011	11:09:33 AM	PH3 valve closed
8/19/2011	11:09:33 AM	SiCl4 pre valve closed
8/19/2011	11:09:33 AM	SiCl4 post valve closed
8/19/2011	11:09:33 AM	Bypass valve closed
8/19/2011	11:09:33 AM	Bubbler valve closed
8/19/2011	11:09:33 AM	Main Vac valve opened
8/19/2011	11:09:33 AM	Helium MFC set to  0.000000
8/19/2011	11:09:33 AM	H2 MFC set to  0.000000
8/19/2011	11:09:33 AM	BCl3 MFC set to  0.000000
8/19/2011	11:09:33 AM	PHl3 MFC set to  0.000000
8/19/2011	11:09:33 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:09:33 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:09:33 AM	Tube furnace set to 150
8/19/2011	11:10:03 AM	H2 valve closed
8/19/2011	11:10:03 AM	BCl3 valve closed
8/19/2011	11:10:03 AM	PH3 valve closed
8/19/2011	11:10:03 AM	SiCl4 pre valve closed
8/19/2011	11:10:03 AM	SiCl4 post valve closed
8/19/2011	11:10:03 AM	Bypass valve closed
8/19/2011	11:10:03 AM	Bubbler valve closed
8/19/2011	11:10:03 AM	Helium valve opened
8/19/2011	11:10:03 AM	Main Vac valve opened
8/19/2011	11:10:03 AM	Helium MFC set to  20.000000
8/19/2011	11:10:03 AM	H2 MFC set to  0.000000
8/19/2011	11:10:03 AM	BCl3 MFC set to  0.000000
8/19/2011	11:10:03 AM	PHl3 MFC set to  0.000000
8/19/2011	11:10:03 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:10:03 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:10:03 AM	Tube furnace set to 150
8/19/2011	11:10:33 AM	Helium valve closed
8/19/2011	11:10:33 AM	H2 valve closed
8/19/2011	11:10:33 AM	BCl3 valve closed
8/19/2011	11:10:33 AM	PH3 valve closed
8/19/2011	11:10:33 AM	SiCl4 pre valve closed
8/19/2011	11:10:33 AM	SiCl4 post valve closed
8/19/2011	11:10:33 AM	Bypass valve closed
8/19/2011	11:10:33 AM	Bubbler valve closed
8/19/2011	11:10:33 AM	Main Vac valve opened
8/19/2011	11:10:34 AM	Helium MFC set to  0.000000
8/19/2011	11:10:34 AM	H2 MFC set to  0.000000
8/19/2011	11:10:34 AM	BCl3 MFC set to  0.000000
8/19/2011	11:10:34 AM	PHl3 MFC set to  0.000000
8/19/2011	11:10:34 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:10:34 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:10:34 AM	Tube furnace set to 150
8/19/2011	11:11:04 AM	H2 valve closed
8/19/2011	11:11:04 AM	BCl3 valve closed
8/19/2011	11:11:04 AM	PH3 valve closed
8/19/2011	11:11:04 AM	SiCl4 pre valve closed
8/19/2011	11:11:04 AM	SiCl4 post valve closed
8/19/2011	11:11:04 AM	Bypass valve closed
8/19/2011	11:11:04 AM	Bubbler valve closed
8/19/2011	11:11:04 AM	Helium valve opened
8/19/2011	11:11:04 AM	Main Vac valve opened
8/19/2011	11:11:04 AM	Helium MFC set to  20.000000
8/19/2011	11:11:04 AM	H2 MFC set to  0.000000
8/19/2011	11:11:04 AM	BCl3 MFC set to  0.000000
8/19/2011	11:11:04 AM	PHl3 MFC set to  0.000000
8/19/2011	11:11:04 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:11:04 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:11:04 AM	Tube furnace set to 150
8/19/2011	11:11:34 AM	Helium valve closed
8/19/2011	11:11:34 AM	H2 valve closed
8/19/2011	11:11:34 AM	BCl3 valve closed
8/19/2011	11:11:34 AM	PH3 valve closed
8/19/2011	11:11:34 AM	SiCl4 pre valve closed
8/19/2011	11:11:34 AM	SiCl4 post valve closed
8/19/2011	11:11:34 AM	Bypass valve closed
8/19/2011	11:11:34 AM	Bubbler valve closed
8/19/2011	11:11:34 AM	Main Vac valve opened
8/19/2011	11:11:34 AM	Helium MFC set to  0.000000
8/19/2011	11:11:34 AM	H2 MFC set to  0.000000
8/19/2011	11:11:34 AM	BCl3 MFC set to  0.000000
8/19/2011	11:11:34 AM	PHl3 MFC set to  0.000000
8/19/2011	11:11:34 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:11:34 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:11:34 AM	Tube furnace set to 150
8/19/2011	11:12:04 AM	H2 valve closed
8/19/2011	11:12:04 AM	BCl3 valve closed
8/19/2011	11:12:04 AM	PH3 valve closed
8/19/2011	11:12:04 AM	SiCl4 pre valve closed
8/19/2011	11:12:04 AM	SiCl4 post valve closed
8/19/2011	11:12:04 AM	Bypass valve closed
8/19/2011	11:12:04 AM	Bubbler valve closed
8/19/2011	11:12:04 AM	Helium valve opened
8/19/2011	11:12:04 AM	Main Vac valve opened
8/19/2011	11:12:04 AM	Helium MFC set to  20.000000
8/19/2011	11:12:04 AM	H2 MFC set to  0.000000
8/19/2011	11:12:04 AM	BCl3 MFC set to  0.000000
8/19/2011	11:12:04 AM	PHl3 MFC set to  0.000000
8/19/2011	11:12:04 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:12:04 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:12:04 AM	Tube furnace set to 150
8/19/2011	11:12:34 AM	Helium valve closed
8/19/2011	11:12:34 AM	H2 valve closed
8/19/2011	11:12:34 AM	BCl3 valve closed
8/19/2011	11:12:34 AM	PH3 valve closed
8/19/2011	11:12:34 AM	SiCl4 pre valve closed
8/19/2011	11:12:34 AM	SiCl4 post valve closed
8/19/2011	11:12:34 AM	Bypass valve closed
8/19/2011	11:12:34 AM	Bubbler valve closed
8/19/2011	11:12:34 AM	Main Vac valve opened
8/19/2011	11:12:34 AM	Helium MFC set to  0.000000
8/19/2011	11:12:34 AM	H2 MFC set to  0.000000
8/19/2011	11:12:34 AM	BCl3 MFC set to  0.000000
8/19/2011	11:12:34 AM	PHl3 MFC set to  0.000000
8/19/2011	11:12:34 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:12:34 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:12:34 AM	Tube furnace set to 150
8/19/2011	11:13:04 AM	H2 valve closed
8/19/2011	11:13:04 AM	BCl3 valve closed
8/19/2011	11:13:04 AM	PH3 valve closed
8/19/2011	11:13:04 AM	SiCl4 pre valve closed
8/19/2011	11:13:04 AM	SiCl4 post valve closed
8/19/2011	11:13:04 AM	Bypass valve closed
8/19/2011	11:13:04 AM	Bubbler valve closed
8/19/2011	11:13:04 AM	Helium valve opened
8/19/2011	11:13:04 AM	Main Vac valve opened
8/19/2011	11:13:04 AM	Helium MFC set to  20.000000
8/19/2011	11:13:04 AM	H2 MFC set to  0.000000
8/19/2011	11:13:04 AM	BCl3 MFC set to  0.000000
8/19/2011	11:13:04 AM	PHl3 MFC set to  0.000000
8/19/2011	11:13:04 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:13:04 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:13:05 AM	Tube furnace set to 150
8/19/2011	11:13:35 AM	Helium valve closed
8/19/2011	11:13:35 AM	H2 valve closed
8/19/2011	11:13:35 AM	BCl3 valve closed
8/19/2011	11:13:35 AM	PH3 valve closed
8/19/2011	11:13:35 AM	SiCl4 pre valve closed
8/19/2011	11:13:35 AM	SiCl4 post valve closed
8/19/2011	11:13:35 AM	Bypass valve closed
8/19/2011	11:13:35 AM	Bubbler valve closed
8/19/2011	11:13:35 AM	Main Vac valve opened
8/19/2011	11:13:35 AM	Helium MFC set to  0.000000
8/19/2011	11:13:35 AM	H2 MFC set to  0.000000
8/19/2011	11:13:35 AM	BCl3 MFC set to  0.000000
8/19/2011	11:13:35 AM	PHl3 MFC set to  0.000000
8/19/2011	11:13:35 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:13:35 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:13:35 AM	Tube furnace set to 150
8/19/2011	11:14:05 AM	H2 valve closed
8/19/2011	11:14:05 AM	BCl3 valve closed
8/19/2011	11:14:05 AM	PH3 valve closed
8/19/2011	11:14:05 AM	SiCl4 pre valve closed
8/19/2011	11:14:05 AM	SiCl4 post valve closed
8/19/2011	11:14:05 AM	Bypass valve closed
8/19/2011	11:14:05 AM	Bubbler valve closed
8/19/2011	11:14:05 AM	Helium valve opened
8/19/2011	11:14:05 AM	Main Vac valve opened
8/19/2011	11:14:05 AM	Helium MFC set to  20.000000
8/19/2011	11:14:05 AM	H2 MFC set to  0.000000
8/19/2011	11:14:05 AM	BCl3 MFC set to  0.000000
8/19/2011	11:14:05 AM	PHl3 MFC set to  0.000000
8/19/2011	11:14:05 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:14:05 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:14:05 AM	Tube furnace set to 150
8/19/2011	11:14:35 AM	Helium valve closed
8/19/2011	11:14:35 AM	H2 valve closed
8/19/2011	11:14:35 AM	BCl3 valve closed
8/19/2011	11:14:35 AM	PH3 valve closed
8/19/2011	11:14:35 AM	SiCl4 pre valve closed
8/19/2011	11:14:35 AM	SiCl4 post valve closed
8/19/2011	11:14:35 AM	Bypass valve closed
8/19/2011	11:14:35 AM	Bubbler valve closed
8/19/2011	11:14:35 AM	Main Vac valve opened
8/19/2011	11:14:35 AM	Helium MFC set to  0.000000
8/19/2011	11:14:35 AM	H2 MFC set to  0.000000
8/19/2011	11:14:35 AM	BCl3 MFC set to  0.000000
8/19/2011	11:14:35 AM	PHl3 MFC set to  0.000000
8/19/2011	11:14:35 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:14:35 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:14:35 AM	Tube furnace set to 150
8/19/2011	11:15:05 AM	H2 valve closed
8/19/2011	11:15:05 AM	BCl3 valve closed
8/19/2011	11:15:05 AM	PH3 valve closed
8/19/2011	11:15:05 AM	SiCl4 pre valve closed
8/19/2011	11:15:05 AM	SiCl4 post valve closed
8/19/2011	11:15:05 AM	Bypass valve closed
8/19/2011	11:15:05 AM	Bubbler valve closed
8/19/2011	11:15:05 AM	Helium valve opened
8/19/2011	11:15:05 AM	Main Vac valve opened
8/19/2011	11:15:05 AM	Helium MFC set to  20.000000
8/19/2011	11:15:05 AM	H2 MFC set to  0.000000
8/19/2011	11:15:05 AM	BCl3 MFC set to  0.000000
8/19/2011	11:15:05 AM	PHl3 MFC set to  0.000000
8/19/2011	11:15:05 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:15:05 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:15:05 AM	Tube furnace set to 150
8/19/2011	11:15:35 AM	Helium valve closed
8/19/2011	11:15:35 AM	H2 valve closed
8/19/2011	11:15:35 AM	BCl3 valve closed
8/19/2011	11:15:35 AM	PH3 valve closed
8/19/2011	11:15:35 AM	SiCl4 pre valve closed
8/19/2011	11:15:35 AM	SiCl4 post valve closed
8/19/2011	11:15:35 AM	Bypass valve closed
8/19/2011	11:15:35 AM	Bubbler valve closed
8/19/2011	11:15:35 AM	Main Vac valve opened
8/19/2011	11:15:35 AM	Helium MFC set to  0.000000
8/19/2011	11:15:35 AM	H2 MFC set to  0.000000
8/19/2011	11:15:35 AM	BCl3 MFC set to  0.000000
8/19/2011	11:15:35 AM	PHl3 MFC set to  0.000000
8/19/2011	11:15:35 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:15:35 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:15:36 AM	Tube furnace set to 150
8/19/2011	11:16:06 AM	H2 valve closed
8/19/2011	11:16:06 AM	BCl3 valve closed
8/19/2011	11:16:06 AM	PH3 valve closed
8/19/2011	11:16:06 AM	SiCl4 pre valve closed
8/19/2011	11:16:06 AM	SiCl4 post valve closed
8/19/2011	11:16:06 AM	Bypass valve closed
8/19/2011	11:16:06 AM	Bubbler valve closed
8/19/2011	11:16:06 AM	Helium valve opened
8/19/2011	11:16:06 AM	Main Vac valve opened
8/19/2011	11:16:06 AM	Helium MFC set to  20.000000
8/19/2011	11:16:06 AM	H2 MFC set to  0.000000
8/19/2011	11:16:06 AM	BCl3 MFC set to  0.000000
8/19/2011	11:16:06 AM	PHl3 MFC set to  0.000000
8/19/2011	11:16:06 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:16:06 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:16:06 AM	Tube furnace set to 150
8/19/2011	11:16:36 AM	Helium valve closed
8/19/2011	11:16:36 AM	H2 valve closed
8/19/2011	11:16:36 AM	BCl3 valve closed
8/19/2011	11:16:36 AM	PH3 valve closed
8/19/2011	11:16:36 AM	SiCl4 pre valve closed
8/19/2011	11:16:36 AM	SiCl4 post valve closed
8/19/2011	11:16:36 AM	Bypass valve closed
8/19/2011	11:16:36 AM	Bubbler valve closed
8/19/2011	11:16:36 AM	Main Vac valve opened
8/19/2011	11:16:36 AM	Helium MFC set to  0.000000
8/19/2011	11:16:36 AM	H2 MFC set to  0.000000
8/19/2011	11:16:36 AM	BCl3 MFC set to  0.000000
8/19/2011	11:16:36 AM	PHl3 MFC set to  0.000000
8/19/2011	11:16:36 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:16:36 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:16:36 AM	Tube furnace set to 150
8/19/2011	11:17:06 AM	H2 valve closed
8/19/2011	11:17:06 AM	BCl3 valve closed
8/19/2011	11:17:06 AM	PH3 valve closed
8/19/2011	11:17:06 AM	SiCl4 pre valve closed
8/19/2011	11:17:06 AM	SiCl4 post valve closed
8/19/2011	11:17:06 AM	Bypass valve closed
8/19/2011	11:17:06 AM	Bubbler valve closed
8/19/2011	11:17:06 AM	Helium valve opened
8/19/2011	11:17:06 AM	Main Vac valve opened
8/19/2011	11:17:06 AM	Helium MFC set to  20.000000
8/19/2011	11:17:06 AM	H2 MFC set to  0.000000
8/19/2011	11:17:06 AM	BCl3 MFC set to  0.000000
8/19/2011	11:17:06 AM	PHl3 MFC set to  0.000000
8/19/2011	11:17:06 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:17:06 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:17:06 AM	Tube furnace set to 150
8/19/2011	11:17:36 AM	Helium valve closed
8/19/2011	11:17:36 AM	H2 valve closed
8/19/2011	11:17:36 AM	BCl3 valve closed
8/19/2011	11:17:36 AM	PH3 valve closed
8/19/2011	11:17:36 AM	SiCl4 pre valve closed
8/19/2011	11:17:36 AM	SiCl4 post valve closed
8/19/2011	11:17:36 AM	Bypass valve closed
8/19/2011	11:17:36 AM	Bubbler valve closed
8/19/2011	11:17:36 AM	Main Vac valve opened
8/19/2011	11:17:36 AM	Helium MFC set to  0.000000
8/19/2011	11:17:36 AM	H2 MFC set to  0.000000
8/19/2011	11:17:36 AM	BCl3 MFC set to  0.000000
8/19/2011	11:17:36 AM	PHl3 MFC set to  0.000000
8/19/2011	11:17:36 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:17:36 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:17:36 AM	Tube furnace set to 150
8/19/2011	11:18:06 AM	H2 valve closed
8/19/2011	11:18:06 AM	BCl3 valve closed
8/19/2011	11:18:06 AM	PH3 valve closed
8/19/2011	11:18:06 AM	SiCl4 pre valve closed
8/19/2011	11:18:06 AM	SiCl4 post valve closed
8/19/2011	11:18:06 AM	Bypass valve closed
8/19/2011	11:18:06 AM	Bubbler valve closed
8/19/2011	11:18:06 AM	Helium valve opened
8/19/2011	11:18:06 AM	Main Vac valve opened
8/19/2011	11:18:06 AM	Helium MFC set to  20.000000
8/19/2011	11:18:06 AM	H2 MFC set to  0.000000
8/19/2011	11:18:06 AM	BCl3 MFC set to  0.000000
8/19/2011	11:18:06 AM	PHl3 MFC set to  0.000000
8/19/2011	11:18:06 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:18:06 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:18:07 AM	Tube furnace set to 150
8/19/2011	11:18:37 AM	Helium valve closed
8/19/2011	11:18:37 AM	H2 valve closed
8/19/2011	11:18:37 AM	BCl3 valve closed
8/19/2011	11:18:37 AM	PH3 valve closed
8/19/2011	11:18:37 AM	SiCl4 pre valve closed
8/19/2011	11:18:37 AM	SiCl4 post valve closed
8/19/2011	11:18:37 AM	Bypass valve closed
8/19/2011	11:18:37 AM	Bubbler valve closed
8/19/2011	11:18:37 AM	Main Vac valve opened
8/19/2011	11:18:37 AM	Helium MFC set to  0.000000
8/19/2011	11:18:37 AM	H2 MFC set to  0.000000
8/19/2011	11:18:37 AM	BCl3 MFC set to  0.000000
8/19/2011	11:18:37 AM	PHl3 MFC set to  0.000000
8/19/2011	11:18:37 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:18:37 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:18:37 AM	Tube furnace set to 150
8/19/2011	11:18:38 AM	Run finished at 11:18 AM
8/19/2011	11:19:49 AM	Helium MFC set to  20.000000
8/19/2011	11:19:51 AM	Helium valve opened
8/19/2011	11:24:51 AM	Helium valve closed
8/19/2011	11:26:10 AM	Helium valve opened
8/19/2011	11:33:48 AM	Helium valve closed
8/19/2011	11:33:51 AM	Helium MFC set to  0.000000
8/19/2011	11:34:35 AM	Recipe started at 11:34 AM
8/19/2011	11:34:35 AM	Helium valve closed
8/19/2011	11:34:35 AM	H2 valve closed
8/19/2011	11:34:35 AM	BCl3 valve closed
8/19/2011	11:34:35 AM	PH3 valve closed
8/19/2011	11:34:35 AM	SiCl4 pre valve closed
8/19/2011	11:34:35 AM	SiCl4 post valve closed
8/19/2011	11:34:35 AM	Bypass valve closed
8/19/2011	11:34:35 AM	Bubbler valve closed
8/19/2011	11:34:35 AM	Main Vac valve opened
8/19/2011	11:34:35 AM	Helium MFC set to  0.000000
8/19/2011	11:34:35 AM	H2 MFC set to  0.000000
8/19/2011	11:34:35 AM	BCl3 MFC set to  0.000000
8/19/2011	11:34:35 AM	PHl3 MFC set to  0.000000
8/19/2011	11:34:35 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:34:35 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:34:36 AM	Tube furnace set to 150
8/19/2011	11:35:06 AM	H2 valve closed
8/19/2011	11:35:06 AM	BCl3 valve closed
8/19/2011	11:35:06 AM	PH3 valve closed
8/19/2011	11:35:06 AM	SiCl4 pre valve closed
8/19/2011	11:35:06 AM	SiCl4 post valve closed
8/19/2011	11:35:06 AM	Bypass valve closed
8/19/2011	11:35:06 AM	Bubbler valve closed
8/19/2011	11:35:06 AM	Helium valve opened
8/19/2011	11:35:06 AM	Main Vac valve opened
8/19/2011	11:35:06 AM	Helium MFC set to  20.000000
8/19/2011	11:35:06 AM	H2 MFC set to  0.000000
8/19/2011	11:35:06 AM	BCl3 MFC set to  0.000000
8/19/2011	11:35:06 AM	PHl3 MFC set to  0.000000
8/19/2011	11:35:06 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:35:06 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:35:06 AM	Tube furnace set to 150
8/19/2011	11:35:36 AM	Helium valve closed
8/19/2011	11:35:36 AM	H2 valve closed
8/19/2011	11:35:36 AM	BCl3 valve closed
8/19/2011	11:35:36 AM	PH3 valve closed
8/19/2011	11:35:36 AM	SiCl4 pre valve closed
8/19/2011	11:35:36 AM	SiCl4 post valve closed
8/19/2011	11:35:36 AM	Bypass valve closed
8/19/2011	11:35:36 AM	Bubbler valve closed
8/19/2011	11:35:36 AM	Main Vac valve opened
8/19/2011	11:35:36 AM	Helium MFC set to  0.000000
8/19/2011	11:35:36 AM	H2 MFC set to  0.000000
8/19/2011	11:35:36 AM	BCl3 MFC set to  0.000000
8/19/2011	11:35:36 AM	PHl3 MFC set to  0.000000
8/19/2011	11:35:36 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:35:36 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:35:36 AM	Tube furnace set to 150
8/19/2011	11:36:06 AM	H2 valve closed
8/19/2011	11:36:06 AM	BCl3 valve closed
8/19/2011	11:36:06 AM	PH3 valve closed
8/19/2011	11:36:06 AM	SiCl4 pre valve closed
8/19/2011	11:36:06 AM	SiCl4 post valve closed
8/19/2011	11:36:06 AM	Bypass valve closed
8/19/2011	11:36:06 AM	Bubbler valve closed
8/19/2011	11:36:06 AM	Helium valve opened
8/19/2011	11:36:06 AM	Main Vac valve opened
8/19/2011	11:36:06 AM	Helium MFC set to  20.000000
8/19/2011	11:36:06 AM	H2 MFC set to  0.000000
8/19/2011	11:36:06 AM	BCl3 MFC set to  0.000000
8/19/2011	11:36:06 AM	PHl3 MFC set to  0.000000
8/19/2011	11:36:06 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:36:06 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:36:06 AM	Tube furnace set to 150
8/19/2011	11:36:36 AM	Helium valve closed
8/19/2011	11:36:36 AM	H2 valve closed
8/19/2011	11:36:36 AM	BCl3 valve closed
8/19/2011	11:36:36 AM	PH3 valve closed
8/19/2011	11:36:36 AM	SiCl4 pre valve closed
8/19/2011	11:36:36 AM	SiCl4 post valve closed
8/19/2011	11:36:36 AM	Bypass valve closed
8/19/2011	11:36:36 AM	Bubbler valve closed
8/19/2011	11:36:36 AM	Main Vac valve opened
8/19/2011	11:36:36 AM	Helium MFC set to  0.000000
8/19/2011	11:36:36 AM	H2 MFC set to  0.000000
8/19/2011	11:36:36 AM	BCl3 MFC set to  0.000000
8/19/2011	11:36:36 AM	PHl3 MFC set to  0.000000
8/19/2011	11:36:36 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:36:36 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:36:36 AM	Tube furnace set to 150
8/19/2011	11:37:06 AM	H2 valve closed
8/19/2011	11:37:06 AM	BCl3 valve closed
8/19/2011	11:37:06 AM	PH3 valve closed
8/19/2011	11:37:06 AM	SiCl4 pre valve closed
8/19/2011	11:37:06 AM	SiCl4 post valve closed
8/19/2011	11:37:06 AM	Bypass valve closed
8/19/2011	11:37:06 AM	Bubbler valve closed
8/19/2011	11:37:06 AM	Helium valve opened
8/19/2011	11:37:06 AM	Main Vac valve opened
8/19/2011	11:37:06 AM	Helium MFC set to  20.000000
8/19/2011	11:37:06 AM	H2 MFC set to  0.000000
8/19/2011	11:37:06 AM	BCl3 MFC set to  0.000000
8/19/2011	11:37:06 AM	PHl3 MFC set to  0.000000
8/19/2011	11:37:06 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:37:06 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:37:07 AM	Tube furnace set to 150
8/19/2011	11:37:37 AM	Helium valve closed
8/19/2011	11:37:37 AM	H2 valve closed
8/19/2011	11:37:37 AM	BCl3 valve closed
8/19/2011	11:37:37 AM	PH3 valve closed
8/19/2011	11:37:37 AM	SiCl4 pre valve closed
8/19/2011	11:37:37 AM	SiCl4 post valve closed
8/19/2011	11:37:37 AM	Bypass valve closed
8/19/2011	11:37:37 AM	Bubbler valve closed
8/19/2011	11:37:37 AM	Main Vac valve opened
8/19/2011	11:37:37 AM	Helium MFC set to  0.000000
8/19/2011	11:37:37 AM	H2 MFC set to  0.000000
8/19/2011	11:37:37 AM	BCl3 MFC set to  0.000000
8/19/2011	11:37:37 AM	PHl3 MFC set to  0.000000
8/19/2011	11:37:37 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:37:37 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:37:37 AM	Tube furnace set to 150
8/19/2011	11:38:07 AM	H2 valve closed
8/19/2011	11:38:07 AM	BCl3 valve closed
8/19/2011	11:38:07 AM	PH3 valve closed
8/19/2011	11:38:07 AM	SiCl4 pre valve closed
8/19/2011	11:38:07 AM	SiCl4 post valve closed
8/19/2011	11:38:07 AM	Bypass valve closed
8/19/2011	11:38:07 AM	Bubbler valve closed
8/19/2011	11:38:07 AM	Helium valve opened
8/19/2011	11:38:07 AM	Main Vac valve opened
8/19/2011	11:38:07 AM	Helium MFC set to  20.000000
8/19/2011	11:38:07 AM	H2 MFC set to  0.000000
8/19/2011	11:38:07 AM	BCl3 MFC set to  0.000000
8/19/2011	11:38:07 AM	PHl3 MFC set to  0.000000
8/19/2011	11:38:07 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:38:07 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:38:07 AM	Tube furnace set to 150
8/19/2011	11:38:37 AM	Helium valve closed
8/19/2011	11:38:37 AM	H2 valve closed
8/19/2011	11:38:37 AM	BCl3 valve closed
8/19/2011	11:38:37 AM	PH3 valve closed
8/19/2011	11:38:37 AM	SiCl4 pre valve closed
8/19/2011	11:38:37 AM	SiCl4 post valve closed
8/19/2011	11:38:37 AM	Bypass valve closed
8/19/2011	11:38:37 AM	Bubbler valve closed
8/19/2011	11:38:37 AM	Main Vac valve opened
8/19/2011	11:38:37 AM	Helium MFC set to  0.000000
8/19/2011	11:38:37 AM	H2 MFC set to  0.000000
8/19/2011	11:38:37 AM	BCl3 MFC set to  0.000000
8/19/2011	11:38:37 AM	PHl3 MFC set to  0.000000
8/19/2011	11:38:37 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:38:37 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:38:37 AM	Tube furnace set to 150
8/19/2011	11:39:07 AM	H2 valve closed
8/19/2011	11:39:07 AM	BCl3 valve closed
8/19/2011	11:39:07 AM	PH3 valve closed
8/19/2011	11:39:07 AM	SiCl4 pre valve closed
8/19/2011	11:39:07 AM	SiCl4 post valve closed
8/19/2011	11:39:07 AM	Bypass valve closed
8/19/2011	11:39:07 AM	Bubbler valve closed
8/19/2011	11:39:07 AM	Helium valve opened
8/19/2011	11:39:07 AM	Main Vac valve opened
8/19/2011	11:39:07 AM	Helium MFC set to  20.000000
8/19/2011	11:39:07 AM	H2 MFC set to  0.000000
8/19/2011	11:39:07 AM	BCl3 MFC set to  0.000000
8/19/2011	11:39:07 AM	PHl3 MFC set to  0.000000
8/19/2011	11:39:07 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:39:07 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:39:07 AM	Tube furnace set to 150
8/19/2011	11:39:37 AM	Helium valve closed
8/19/2011	11:39:37 AM	H2 valve closed
8/19/2011	11:39:37 AM	BCl3 valve closed
8/19/2011	11:39:37 AM	PH3 valve closed
8/19/2011	11:39:37 AM	SiCl4 pre valve closed
8/19/2011	11:39:37 AM	SiCl4 post valve closed
8/19/2011	11:39:37 AM	Bypass valve closed
8/19/2011	11:39:37 AM	Bubbler valve closed
8/19/2011	11:39:37 AM	Main Vac valve opened
8/19/2011	11:39:37 AM	Helium MFC set to  0.000000
8/19/2011	11:39:37 AM	H2 MFC set to  0.000000
8/19/2011	11:39:37 AM	BCl3 MFC set to  0.000000
8/19/2011	11:39:37 AM	PHl3 MFC set to  0.000000
8/19/2011	11:39:37 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:39:37 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:39:38 AM	Tube furnace set to 150
8/19/2011	11:40:08 AM	H2 valve closed
8/19/2011	11:40:08 AM	BCl3 valve closed
8/19/2011	11:40:08 AM	PH3 valve closed
8/19/2011	11:40:08 AM	SiCl4 pre valve closed
8/19/2011	11:40:08 AM	SiCl4 post valve closed
8/19/2011	11:40:08 AM	Bypass valve closed
8/19/2011	11:40:08 AM	Bubbler valve closed
8/19/2011	11:40:08 AM	Helium valve opened
8/19/2011	11:40:08 AM	Main Vac valve opened
8/19/2011	11:40:08 AM	Helium MFC set to  20.000000
8/19/2011	11:40:08 AM	H2 MFC set to  0.000000
8/19/2011	11:40:08 AM	BCl3 MFC set to  0.000000
8/19/2011	11:40:08 AM	PHl3 MFC set to  0.000000
8/19/2011	11:40:08 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:40:08 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:40:08 AM	Tube furnace set to 150
8/19/2011	11:40:38 AM	Helium valve closed
8/19/2011	11:40:38 AM	H2 valve closed
8/19/2011	11:40:38 AM	BCl3 valve closed
8/19/2011	11:40:38 AM	PH3 valve closed
8/19/2011	11:40:38 AM	SiCl4 pre valve closed
8/19/2011	11:40:38 AM	SiCl4 post valve closed
8/19/2011	11:40:38 AM	Bypass valve closed
8/19/2011	11:40:38 AM	Bubbler valve closed
8/19/2011	11:40:38 AM	Main Vac valve opened
8/19/2011	11:40:38 AM	Helium MFC set to  0.000000
8/19/2011	11:40:38 AM	H2 MFC set to  0.000000
8/19/2011	11:40:38 AM	BCl3 MFC set to  0.000000
8/19/2011	11:40:38 AM	PHl3 MFC set to  0.000000
8/19/2011	11:40:38 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:40:38 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:40:38 AM	Tube furnace set to 150
8/19/2011	11:41:08 AM	H2 valve closed
8/19/2011	11:41:08 AM	BCl3 valve closed
8/19/2011	11:41:08 AM	PH3 valve closed
8/19/2011	11:41:08 AM	SiCl4 pre valve closed
8/19/2011	11:41:08 AM	SiCl4 post valve closed
8/19/2011	11:41:08 AM	Bypass valve closed
8/19/2011	11:41:08 AM	Bubbler valve closed
8/19/2011	11:41:08 AM	Helium valve opened
8/19/2011	11:41:08 AM	Main Vac valve opened
8/19/2011	11:41:08 AM	Helium MFC set to  20.000000
8/19/2011	11:41:08 AM	H2 MFC set to  0.000000
8/19/2011	11:41:08 AM	BCl3 MFC set to  0.000000
8/19/2011	11:41:08 AM	PHl3 MFC set to  0.000000
8/19/2011	11:41:08 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:41:08 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:41:08 AM	Tube furnace set to 150
8/19/2011	11:41:38 AM	Helium valve closed
8/19/2011	11:41:38 AM	H2 valve closed
8/19/2011	11:41:38 AM	BCl3 valve closed
8/19/2011	11:41:38 AM	PH3 valve closed
8/19/2011	11:41:38 AM	SiCl4 pre valve closed
8/19/2011	11:41:38 AM	SiCl4 post valve closed
8/19/2011	11:41:38 AM	Bypass valve closed
8/19/2011	11:41:38 AM	Bubbler valve closed
8/19/2011	11:41:38 AM	Main Vac valve opened
8/19/2011	11:41:38 AM	Helium MFC set to  0.000000
8/19/2011	11:41:38 AM	H2 MFC set to  0.000000
8/19/2011	11:41:38 AM	BCl3 MFC set to  0.000000
8/19/2011	11:41:38 AM	PHl3 MFC set to  0.000000
8/19/2011	11:41:38 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:41:38 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:41:38 AM	Tube furnace set to 150
8/19/2011	11:42:08 AM	H2 valve closed
8/19/2011	11:42:08 AM	BCl3 valve closed
8/19/2011	11:42:08 AM	PH3 valve closed
8/19/2011	11:42:08 AM	SiCl4 pre valve closed
8/19/2011	11:42:08 AM	SiCl4 post valve closed
8/19/2011	11:42:08 AM	Bypass valve closed
8/19/2011	11:42:08 AM	Bubbler valve closed
8/19/2011	11:42:08 AM	Helium valve opened
8/19/2011	11:42:08 AM	Main Vac valve opened
8/19/2011	11:42:08 AM	Helium MFC set to  20.000000
8/19/2011	11:42:08 AM	H2 MFC set to  0.000000
8/19/2011	11:42:08 AM	BCl3 MFC set to  0.000000
8/19/2011	11:42:08 AM	PHl3 MFC set to  0.000000
8/19/2011	11:42:08 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:42:08 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:42:09 AM	Tube furnace set to 150
8/19/2011	11:42:39 AM	Helium valve closed
8/19/2011	11:42:39 AM	H2 valve closed
8/19/2011	11:42:39 AM	BCl3 valve closed
8/19/2011	11:42:39 AM	PH3 valve closed
8/19/2011	11:42:39 AM	SiCl4 pre valve closed
8/19/2011	11:42:39 AM	SiCl4 post valve closed
8/19/2011	11:42:39 AM	Bypass valve closed
8/19/2011	11:42:39 AM	Bubbler valve closed
8/19/2011	11:42:39 AM	Main Vac valve opened
8/19/2011	11:42:39 AM	Helium MFC set to  0.000000
8/19/2011	11:42:39 AM	H2 MFC set to  0.000000
8/19/2011	11:42:39 AM	BCl3 MFC set to  0.000000
8/19/2011	11:42:39 AM	PHl3 MFC set to  0.000000
8/19/2011	11:42:39 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:42:39 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:42:39 AM	Tube furnace set to 150
8/19/2011	11:43:09 AM	H2 valve closed
8/19/2011	11:43:09 AM	BCl3 valve closed
8/19/2011	11:43:09 AM	PH3 valve closed
8/19/2011	11:43:09 AM	SiCl4 pre valve closed
8/19/2011	11:43:09 AM	SiCl4 post valve closed
8/19/2011	11:43:09 AM	Bypass valve closed
8/19/2011	11:43:09 AM	Bubbler valve closed
8/19/2011	11:43:09 AM	Helium valve opened
8/19/2011	11:43:09 AM	Main Vac valve opened
8/19/2011	11:43:09 AM	Helium MFC set to  20.000000
8/19/2011	11:43:09 AM	H2 MFC set to  0.000000
8/19/2011	11:43:09 AM	BCl3 MFC set to  0.000000
8/19/2011	11:43:09 AM	PHl3 MFC set to  0.000000
8/19/2011	11:43:09 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:43:09 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:43:09 AM	Tube furnace set to 150
8/19/2011	11:43:39 AM	Helium valve closed
8/19/2011	11:43:39 AM	H2 valve closed
8/19/2011	11:43:39 AM	BCl3 valve closed
8/19/2011	11:43:39 AM	PH3 valve closed
8/19/2011	11:43:39 AM	SiCl4 pre valve closed
8/19/2011	11:43:39 AM	SiCl4 post valve closed
8/19/2011	11:43:39 AM	Bypass valve closed
8/19/2011	11:43:39 AM	Bubbler valve closed
8/19/2011	11:43:39 AM	Main Vac valve opened
8/19/2011	11:43:39 AM	Helium MFC set to  0.000000
8/19/2011	11:43:39 AM	H2 MFC set to  0.000000
8/19/2011	11:43:39 AM	BCl3 MFC set to  0.000000
8/19/2011	11:43:39 AM	PHl3 MFC set to  0.000000
8/19/2011	11:43:39 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:43:39 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:43:39 AM	Tube furnace set to 150
8/19/2011	11:44:09 AM	H2 valve closed
8/19/2011	11:44:09 AM	BCl3 valve closed
8/19/2011	11:44:09 AM	PH3 valve closed
8/19/2011	11:44:09 AM	SiCl4 pre valve closed
8/19/2011	11:44:09 AM	SiCl4 post valve closed
8/19/2011	11:44:09 AM	Bypass valve closed
8/19/2011	11:44:09 AM	Bubbler valve closed
8/19/2011	11:44:09 AM	Helium valve opened
8/19/2011	11:44:09 AM	Main Vac valve opened
8/19/2011	11:44:09 AM	Helium MFC set to  20.000000
8/19/2011	11:44:09 AM	H2 MFC set to  0.000000
8/19/2011	11:44:09 AM	BCl3 MFC set to  0.000000
8/19/2011	11:44:09 AM	PHl3 MFC set to  0.000000
8/19/2011	11:44:09 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:44:09 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:44:09 AM	Tube furnace set to 150
8/19/2011	11:44:39 AM	Helium valve closed
8/19/2011	11:44:39 AM	H2 valve closed
8/19/2011	11:44:39 AM	BCl3 valve closed
8/19/2011	11:44:39 AM	PH3 valve closed
8/19/2011	11:44:40 AM	SiCl4 pre valve closed
8/19/2011	11:44:40 AM	SiCl4 post valve closed
8/19/2011	11:44:40 AM	Bypass valve closed
8/19/2011	11:44:40 AM	Bubbler valve closed
8/19/2011	11:44:40 AM	Main Vac valve opened
8/19/2011	11:44:40 AM	Helium MFC set to  0.000000
8/19/2011	11:44:40 AM	H2 MFC set to  0.000000
8/19/2011	11:44:40 AM	BCl3 MFC set to  0.000000
8/19/2011	11:44:40 AM	PHl3 MFC set to  0.000000
8/19/2011	11:44:40 AM	SiCl4 MFC set to  0.000000
8/19/2011	11:44:40 AM	Bypass solenoid MFC set to  0.000000
8/19/2011	11:44:40 AM	Tube furnace set to 150
8/19/2011	11:44:41 AM	Run finished at 11:44 AM
8/19/2011	12:07:29 PM	Helium MFC set to  20.000000
8/19/2011	12:07:31 PM	Helium valve opened
8/19/2011	12:25:29 PM	Helium valve closed
8/19/2011	12:25:32 PM	Helium MFC set to  0.000000
8/19/2011	12:28:19 PM	Recipe started at 12:28 PM
8/19/2011	12:28:19 PM	Helium valve closed
8/19/2011	12:28:19 PM	H2 valve closed
8/19/2011	12:28:19 PM	BCl3 valve closed
8/19/2011	12:28:19 PM	PH3 valve closed
8/19/2011	12:28:19 PM	SiCl4 pre valve closed
8/19/2011	12:28:19 PM	SiCl4 post valve closed
8/19/2011	12:28:19 PM	Main Vac valve closed
8/19/2011	12:28:19 PM	Bypass valve closed
8/19/2011	12:28:19 PM	Bubbler valve closed
8/19/2011	12:28:19 PM	Helium MFC set to  0.000000
8/19/2011	12:28:19 PM	H2 MFC set to  0.000000
8/19/2011	12:28:19 PM	BCl3 MFC set to  0.000000
8/19/2011	12:28:19 PM	PHl3 MFC set to  0.000000
8/19/2011	12:28:19 PM	SiCl4 MFC set to  0.000000
8/19/2011	12:28:19 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	12:28:19 PM	Tube furnace set to 0
8/19/2011	12:28:22 PM	Helium valve closed
8/19/2011	12:28:22 PM	BCl3 valve closed
8/19/2011	12:28:22 PM	PH3 valve closed
8/19/2011	12:28:22 PM	SiCl4 pre valve closed
8/19/2011	12:28:22 PM	SiCl4 post valve closed
8/19/2011	12:28:22 PM	Main Vac valve closed
8/19/2011	12:28:22 PM	Bypass valve closed
8/19/2011	12:28:22 PM	Bubbler valve closed
8/19/2011	12:28:22 PM	H2 valve opened
8/19/2011	12:28:22 PM	Helium MFC set to  0.000000
8/19/2011	12:28:22 PM	H2 MFC set to  500.000000
8/19/2011	12:28:22 PM	BCl3 MFC set to  0.000000
8/19/2011	12:28:22 PM	PHl3 MFC set to  0.000000
8/19/2011	12:28:22 PM	SiCl4 MFC set to  0.000000
8/19/2011	12:28:22 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	12:28:22 PM	Tube furnace set to 0
8/19/2011	12:29:24 PM	Helium valve closed
8/19/2011	12:29:24 PM	BCl3 valve closed
8/19/2011	12:29:24 PM	PH3 valve closed
8/19/2011	12:29:24 PM	SiCl4 pre valve closed
8/19/2011	12:29:24 PM	SiCl4 post valve closed
8/19/2011	12:29:24 PM	Main Vac valve closed
8/19/2011	12:29:24 PM	Bypass valve closed
8/19/2011	12:29:24 PM	H2 valve opened
8/19/2011	12:29:24 PM	Bubbler valve opened
8/19/2011	12:29:24 PM	Helium MFC set to  0.000000
8/19/2011	12:29:24 PM	H2 MFC set to  500.000000
8/19/2011	12:29:24 PM	BCl3 MFC set to  0.000000
8/19/2011	12:29:24 PM	PHl3 MFC set to  0.000000
8/19/2011	12:29:24 PM	SiCl4 MFC set to  0.000000
8/19/2011	12:29:24 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	12:29:24 PM	Tube furnace set to 0
8/19/2011	12:29:25 PM	Helium valve closed
8/19/2011	12:29:25 PM	BCl3 valve closed
8/19/2011	12:29:25 PM	PH3 valve closed
8/19/2011	12:29:25 PM	SiCl4 pre valve closed
8/19/2011	12:29:25 PM	SiCl4 post valve closed
8/19/2011	12:29:25 PM	Main Vac valve closed
8/19/2011	12:29:25 PM	Bypass valve closed
8/19/2011	12:29:25 PM	H2 valve opened
8/19/2011	12:29:25 PM	Bubbler valve opened
8/19/2011	12:29:25 PM	Helium MFC set to  0.000000
8/19/2011	12:29:25 PM	H2 MFC set to  500.000000
8/19/2011	12:29:25 PM	BCl3 MFC set to  0.000000
8/19/2011	12:29:25 PM	PHl3 MFC set to  0.000000
8/19/2011	12:29:25 PM	SiCl4 MFC set to  0.000000
8/19/2011	12:29:25 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	12:29:26 PM	Tube furnace set to 1000
8/19/2011	12:49:26 PM	Helium valve closed
8/19/2011	12:49:26 PM	PH3 valve closed
8/19/2011	12:49:26 PM	Main Vac valve closed
8/19/2011	12:49:26 PM	Bypass valve closed
8/19/2011	12:49:26 PM	H2 valve opened
8/19/2011	12:49:26 PM	BCl3 valve opened
8/19/2011	12:49:26 PM	SiCl4 pre valve opened
8/19/2011	12:49:26 PM	SiCl4 post valve opened
8/19/2011	12:49:26 PM	Bubbler valve opened
8/19/2011	12:49:26 PM	Helium MFC set to  0.000000
8/19/2011	12:49:26 PM	H2 MFC set to  500.000000
8/19/2011	12:49:26 PM	BCl3 MFC set to  2.400000
8/19/2011	12:49:26 PM	PHl3 MFC set to  0.000000
8/19/2011	12:49:26 PM	SiCl4 MFC set to  50.000000
8/19/2011	12:49:26 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	12:49:26 PM	Tube furnace set to 1000
8/19/2011	1:06:06 PM	Helium valve closed
8/19/2011	1:06:06 PM	BCl3 valve closed
8/19/2011	1:06:06 PM	PH3 valve closed
8/19/2011	1:06:06 PM	SiCl4 pre valve closed
8/19/2011	1:06:06 PM	SiCl4 post valve closed
8/19/2011	1:06:06 PM	Main Vac valve closed
8/19/2011	1:06:06 PM	Bypass valve closed
8/19/2011	1:06:06 PM	H2 valve opened
8/19/2011	1:06:06 PM	Bubbler valve opened
8/19/2011	1:06:06 PM	Helium MFC set to  0.000000
8/19/2011	1:06:06 PM	H2 MFC set to  500.000000
8/19/2011	1:06:06 PM	BCl3 MFC set to  0.000000
8/19/2011	1:06:06 PM	PHl3 MFC set to  0.000000
8/19/2011	1:06:06 PM	SiCl4 MFC set to  0.000000
8/19/2011	1:06:06 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	1:06:06 PM	Tube furnace set to 750
8/19/2011	1:11:06 PM	H2 valve closed
8/19/2011	1:11:06 PM	BCl3 valve closed
8/19/2011	1:11:06 PM	PH3 valve closed
8/19/2011	1:11:06 PM	SiCl4 pre valve closed
8/19/2011	1:11:06 PM	SiCl4 post valve closed
8/19/2011	1:11:06 PM	Main Vac valve closed
8/19/2011	1:11:06 PM	Bypass valve closed
8/19/2011	1:11:06 PM	Helium valve opened
8/19/2011	1:11:06 PM	Bubbler valve opened
8/19/2011	1:11:06 PM	Helium MFC set to  500.000000
8/19/2011	1:11:06 PM	H2 MFC set to  0.000000
8/19/2011	1:11:06 PM	BCl3 MFC set to  0.000000
8/19/2011	1:11:06 PM	PHl3 MFC set to  0.000000
8/19/2011	1:11:06 PM	SiCl4 MFC set to  0.000000
8/19/2011	1:11:06 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	1:11:06 PM	Tube furnace set to 0
8/19/2011	1:31:06 PM	Helium valve closed
8/19/2011	1:31:06 PM	H2 valve closed
8/19/2011	1:31:06 PM	BCl3 valve closed
8/19/2011	1:31:06 PM	PH3 valve closed
8/19/2011	1:31:06 PM	SiCl4 pre valve closed
8/19/2011	1:31:06 PM	SiCl4 post valve closed
8/19/2011	1:31:06 PM	Main Vac valve closed
8/19/2011	1:31:06 PM	Bypass valve closed
8/19/2011	1:31:06 PM	Bubbler valve closed
8/19/2011	1:31:06 PM	Helium MFC set to  0.000000
8/19/2011	1:31:06 PM	H2 MFC set to  0.000000
8/19/2011	1:31:06 PM	BCl3 MFC set to  0.000000
8/19/2011	1:31:06 PM	PHl3 MFC set to  0.000000
8/19/2011	1:31:06 PM	SiCl4 MFC set to  0.000000
8/19/2011	1:31:06 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	1:31:06 PM	Tube furnace set to 0
8/19/2011	1:31:07 PM	Run finished at 1:31 PM
8/19/2011	2:23:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2011	2:23:56 PM	Recipe started at 2:23 PM
8/19/2011	2:23:56 PM	Helium valve closed
8/19/2011	2:23:56 PM	H2 valve closed
8/19/2011	2:23:56 PM	BCl3 valve closed
8/19/2011	2:23:56 PM	PH3 valve closed
8/19/2011	2:23:56 PM	SiCl4 pre valve closed
8/19/2011	2:23:56 PM	SiCl4 post valve closed
8/19/2011	2:23:56 PM	Main Vac valve closed
8/19/2011	2:23:56 PM	Bypass valve closed
8/19/2011	2:23:56 PM	Bubbler valve closed
8/19/2011	2:23:56 PM	Helium MFC set to  0.000000
8/19/2011	2:23:56 PM	H2 MFC set to  0.000000
8/19/2011	2:23:56 PM	BCl3 MFC set to  0.000000
8/19/2011	2:23:56 PM	PHl3 MFC set to  0.000000
8/19/2011	2:23:56 PM	SiCl4 MFC set to  0.000000
8/19/2011	2:23:56 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	2:23:56 PM	Tube furnace set to 0
8/19/2011	2:23:59 PM	H2 valve closed
8/19/2011	2:23:59 PM	BCl3 valve closed
8/19/2011	2:23:59 PM	PH3 valve closed
8/19/2011	2:23:59 PM	SiCl4 pre valve closed
8/19/2011	2:23:59 PM	SiCl4 post valve closed
8/19/2011	2:23:59 PM	Main Vac valve closed
8/19/2011	2:23:59 PM	Bypass valve closed
8/19/2011	2:23:59 PM	Bubbler valve closed
8/19/2011	2:23:59 PM	Helium valve opened
8/19/2011	2:23:59 PM	Helium MFC set to  500.000000
8/19/2011	2:23:59 PM	H2 MFC set to  0.000000
8/19/2011	2:23:59 PM	BCl3 MFC set to  0.000000
8/19/2011	2:23:59 PM	PHl3 MFC set to  0.000000
8/19/2011	2:23:59 PM	SiCl4 MFC set to  0.000000
8/19/2011	2:23:59 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	2:23:59 PM	Tube furnace set to 0
8/19/2011	2:24:01 PM	Helium valve closed
8/19/2011	2:24:02 PM	H2 valve closed
8/19/2011	2:24:02 PM	BCl3 valve closed
8/19/2011	2:24:02 PM	PH3 valve closed
8/19/2011	2:24:02 PM	SiCl4 pre valve closed
8/19/2011	2:24:02 PM	SiCl4 post valve closed
8/19/2011	2:24:02 PM	Main Vac valve closed
8/19/2011	2:24:02 PM	Bypass valve closed
8/19/2011	2:24:02 PM	Bubbler valve closed
8/19/2011	2:24:02 PM	Helium MFC set to  0.000000
8/19/2011	2:24:02 PM	H2 MFC set to  0.000000
8/19/2011	2:24:02 PM	BCl3 MFC set to  0.000000
8/19/2011	2:24:02 PM	PHl3 MFC set to  0.000000
8/19/2011	2:24:02 PM	SiCl4 MFC set to  0.000000
8/19/2011	2:24:02 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	2:24:02 PM	Tube furnace set to 0
8/19/2011	2:24:03 PM	Run finished at 2:24 PM
8/19/2011	2:24:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2011	2:31:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2011	2:31:33 PM	Recipe started at 2:31 PM
8/19/2011	2:31:33 PM	Helium valve closed
8/19/2011	2:31:33 PM	H2 valve closed
8/19/2011	2:31:33 PM	BCl3 valve closed
8/19/2011	2:31:33 PM	PH3 valve closed
8/19/2011	2:31:33 PM	SiCl4 pre valve closed
8/19/2011	2:31:33 PM	SiCl4 post valve closed
8/19/2011	2:31:33 PM	Main Vac valve closed
8/19/2011	2:31:33 PM	Bubbler valve closed
8/19/2011	2:31:33 PM	Bypass valve opened
8/19/2011	2:31:33 PM	Helium MFC set to  0.000000
8/19/2011	2:31:33 PM	H2 MFC set to  0.000000
8/19/2011	2:31:33 PM	BCl3 MFC set to  0.000000
8/19/2011	2:31:33 PM	PHl3 MFC set to  0.000000
8/19/2011	2:31:33 PM	SiCl4 MFC set to  0.000000
8/19/2011	2:31:33 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	2:31:33 PM	Tube furnace set to 0
8/19/2011	2:32:41 PM	Helium valve closed
8/19/2011	2:32:41 PM	H2 valve closed
8/19/2011	2:32:41 PM	BCl3 valve closed
8/19/2011	2:32:41 PM	PH3 valve closed
8/19/2011	2:32:41 PM	SiCl4 pre valve closed
8/19/2011	2:32:41 PM	SiCl4 post valve closed
8/19/2011	2:32:41 PM	Main Vac valve closed
8/19/2011	2:32:41 PM	Bubbler valve closed
8/19/2011	2:32:41 PM	Bypass valve opened
8/19/2011	2:32:41 PM	Helium MFC set to  0.000000
8/19/2011	2:32:41 PM	H2 MFC set to  0.000000
8/19/2011	2:32:41 PM	BCl3 MFC set to  0.000000
8/19/2011	2:32:41 PM	PHl3 MFC set to  0.000000
8/19/2011	2:32:41 PM	SiCl4 MFC set to  0.000000
8/19/2011	2:32:41 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	2:32:42 PM	Tube furnace set to 0
8/19/2011	2:33:42 PM	Helium valve closed
8/19/2011	2:33:42 PM	H2 valve closed
8/19/2011	2:33:42 PM	BCl3 valve closed
8/19/2011	2:33:42 PM	PH3 valve closed
8/19/2011	2:33:42 PM	SiCl4 pre valve closed
8/19/2011	2:33:42 PM	SiCl4 post valve closed
8/19/2011	2:33:42 PM	Bypass valve closed
8/19/2011	2:33:42 PM	Bubbler valve closed
8/19/2011	2:33:42 PM	Main Vac valve opened
8/19/2011	2:33:42 PM	Helium MFC set to  0.000000
8/19/2011	2:33:42 PM	H2 MFC set to  0.000000
8/19/2011	2:33:42 PM	BCl3 MFC set to  0.000000
8/19/2011	2:33:42 PM	PHl3 MFC set to  0.000000
8/19/2011	2:33:42 PM	SiCl4 MFC set to  0.000000
8/19/2011	2:33:42 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	2:33:42 PM	Tube furnace set to 0
8/19/2011	2:33:43 PM	Run finished at 2:33 PM
8/19/2011	2:33:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2011	2:37:16 PM	Helium MFC set to  20.000000
8/19/2011	2:37:18 PM	Helium valve opened
8/19/2011	2:58:46 PM	Helium valve closed
8/19/2011	2:58:50 PM	Helium MFC set to  0.000000
8/19/2011	2:59:42 PM	Recipe started at 2:59 PM
8/19/2011	2:59:42 PM	Helium valve closed
8/19/2011	2:59:42 PM	H2 valve closed
8/19/2011	2:59:42 PM	BCl3 valve closed
8/19/2011	2:59:42 PM	PH3 valve closed
8/19/2011	2:59:42 PM	SiCl4 pre valve closed
8/19/2011	2:59:42 PM	SiCl4 post valve closed
8/19/2011	2:59:42 PM	Bypass valve closed
8/19/2011	2:59:42 PM	Bubbler valve closed
8/19/2011	2:59:42 PM	Main Vac valve opened
8/19/2011	2:59:42 PM	Helium MFC set to  0.000000
8/19/2011	2:59:42 PM	H2 MFC set to  0.000000
8/19/2011	2:59:42 PM	BCl3 MFC set to  0.000000
8/19/2011	2:59:42 PM	PHl3 MFC set to  0.000000
8/19/2011	2:59:42 PM	SiCl4 MFC set to  0.000000
8/19/2011	2:59:42 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	2:59:42 PM	Tube furnace set to 150
8/19/2011	3:00:12 PM	H2 valve closed
8/19/2011	3:00:12 PM	BCl3 valve closed
8/19/2011	3:00:12 PM	PH3 valve closed
8/19/2011	3:00:12 PM	SiCl4 pre valve closed
8/19/2011	3:00:12 PM	SiCl4 post valve closed
8/19/2011	3:00:12 PM	Bypass valve closed
8/19/2011	3:00:12 PM	Bubbler valve closed
8/19/2011	3:00:12 PM	Helium valve opened
8/19/2011	3:00:12 PM	Main Vac valve opened
8/19/2011	3:00:12 PM	Helium MFC set to  20.000000
8/19/2011	3:00:12 PM	H2 MFC set to  0.000000
8/19/2011	3:00:12 PM	BCl3 MFC set to  0.000000
8/19/2011	3:00:12 PM	PHl3 MFC set to  0.000000
8/19/2011	3:00:12 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:00:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:00:13 PM	Tube furnace set to 150
8/19/2011	3:00:43 PM	Helium valve closed
8/19/2011	3:00:43 PM	H2 valve closed
8/19/2011	3:00:43 PM	BCl3 valve closed
8/19/2011	3:00:43 PM	PH3 valve closed
8/19/2011	3:00:43 PM	SiCl4 pre valve closed
8/19/2011	3:00:43 PM	SiCl4 post valve closed
8/19/2011	3:00:43 PM	Bypass valve closed
8/19/2011	3:00:43 PM	Bubbler valve closed
8/19/2011	3:00:43 PM	Main Vac valve opened
8/19/2011	3:00:43 PM	Helium MFC set to  0.000000
8/19/2011	3:00:43 PM	H2 MFC set to  0.000000
8/19/2011	3:00:43 PM	BCl3 MFC set to  0.000000
8/19/2011	3:00:43 PM	PHl3 MFC set to  0.000000
8/19/2011	3:00:43 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:00:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:00:43 PM	Tube furnace set to 150
8/19/2011	3:01:13 PM	H2 valve closed
8/19/2011	3:01:13 PM	BCl3 valve closed
8/19/2011	3:01:13 PM	PH3 valve closed
8/19/2011	3:01:13 PM	SiCl4 pre valve closed
8/19/2011	3:01:13 PM	SiCl4 post valve closed
8/19/2011	3:01:13 PM	Bypass valve closed
8/19/2011	3:01:13 PM	Bubbler valve closed
8/19/2011	3:01:13 PM	Helium valve opened
8/19/2011	3:01:13 PM	Main Vac valve opened
8/19/2011	3:01:13 PM	Helium MFC set to  20.000000
8/19/2011	3:01:13 PM	H2 MFC set to  0.000000
8/19/2011	3:01:13 PM	BCl3 MFC set to  0.000000
8/19/2011	3:01:13 PM	PHl3 MFC set to  0.000000
8/19/2011	3:01:13 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:01:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:01:13 PM	Tube furnace set to 150
8/19/2011	3:01:43 PM	Helium valve closed
8/19/2011	3:01:43 PM	H2 valve closed
8/19/2011	3:01:43 PM	BCl3 valve closed
8/19/2011	3:01:43 PM	PH3 valve closed
8/19/2011	3:01:43 PM	SiCl4 pre valve closed
8/19/2011	3:01:43 PM	SiCl4 post valve closed
8/19/2011	3:01:43 PM	Bypass valve closed
8/19/2011	3:01:43 PM	Bubbler valve closed
8/19/2011	3:01:43 PM	Main Vac valve opened
8/19/2011	3:01:43 PM	Helium MFC set to  0.000000
8/19/2011	3:01:43 PM	H2 MFC set to  0.000000
8/19/2011	3:01:43 PM	BCl3 MFC set to  0.000000
8/19/2011	3:01:43 PM	PHl3 MFC set to  0.000000
8/19/2011	3:01:43 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:01:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:01:43 PM	Tube furnace set to 150
8/19/2011	3:02:13 PM	H2 valve closed
8/19/2011	3:02:13 PM	BCl3 valve closed
8/19/2011	3:02:13 PM	PH3 valve closed
8/19/2011	3:02:13 PM	SiCl4 pre valve closed
8/19/2011	3:02:13 PM	SiCl4 post valve closed
8/19/2011	3:02:13 PM	Bypass valve closed
8/19/2011	3:02:13 PM	Bubbler valve closed
8/19/2011	3:02:13 PM	Helium valve opened
8/19/2011	3:02:13 PM	Main Vac valve opened
8/19/2011	3:02:13 PM	Helium MFC set to  20.000000
8/19/2011	3:02:13 PM	H2 MFC set to  0.000000
8/19/2011	3:02:13 PM	BCl3 MFC set to  0.000000
8/19/2011	3:02:13 PM	PHl3 MFC set to  0.000000
8/19/2011	3:02:13 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:02:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:02:13 PM	Tube furnace set to 150
8/19/2011	3:02:43 PM	Helium valve closed
8/19/2011	3:02:43 PM	H2 valve closed
8/19/2011	3:02:43 PM	BCl3 valve closed
8/19/2011	3:02:43 PM	PH3 valve closed
8/19/2011	3:02:43 PM	SiCl4 pre valve closed
8/19/2011	3:02:43 PM	SiCl4 post valve closed
8/19/2011	3:02:43 PM	Bypass valve closed
8/19/2011	3:02:43 PM	Bubbler valve closed
8/19/2011	3:02:43 PM	Main Vac valve opened
8/19/2011	3:02:43 PM	Helium MFC set to  0.000000
8/19/2011	3:02:43 PM	H2 MFC set to  0.000000
8/19/2011	3:02:43 PM	BCl3 MFC set to  0.000000
8/19/2011	3:02:43 PM	PHl3 MFC set to  0.000000
8/19/2011	3:02:43 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:02:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:02:44 PM	Tube furnace set to 150
8/19/2011	3:03:14 PM	H2 valve closed
8/19/2011	3:03:14 PM	BCl3 valve closed
8/19/2011	3:03:14 PM	PH3 valve closed
8/19/2011	3:03:14 PM	SiCl4 pre valve closed
8/19/2011	3:03:14 PM	SiCl4 post valve closed
8/19/2011	3:03:14 PM	Bypass valve closed
8/19/2011	3:03:14 PM	Bubbler valve closed
8/19/2011	3:03:14 PM	Helium valve opened
8/19/2011	3:03:14 PM	Main Vac valve opened
8/19/2011	3:03:14 PM	Helium MFC set to  20.000000
8/19/2011	3:03:14 PM	H2 MFC set to  0.000000
8/19/2011	3:03:14 PM	BCl3 MFC set to  0.000000
8/19/2011	3:03:14 PM	PHl3 MFC set to  0.000000
8/19/2011	3:03:14 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:03:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:03:14 PM	Tube furnace set to 150
8/19/2011	3:03:44 PM	Helium valve closed
8/19/2011	3:03:44 PM	H2 valve closed
8/19/2011	3:03:44 PM	BCl3 valve closed
8/19/2011	3:03:44 PM	PH3 valve closed
8/19/2011	3:03:44 PM	SiCl4 pre valve closed
8/19/2011	3:03:44 PM	SiCl4 post valve closed
8/19/2011	3:03:44 PM	Bypass valve closed
8/19/2011	3:03:44 PM	Bubbler valve closed
8/19/2011	3:03:44 PM	Main Vac valve opened
8/19/2011	3:03:44 PM	Helium MFC set to  0.000000
8/19/2011	3:03:44 PM	H2 MFC set to  0.000000
8/19/2011	3:03:44 PM	BCl3 MFC set to  0.000000
8/19/2011	3:03:44 PM	PHl3 MFC set to  0.000000
8/19/2011	3:03:44 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:03:44 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:03:44 PM	Tube furnace set to 150
8/19/2011	3:04:14 PM	H2 valve closed
8/19/2011	3:04:14 PM	BCl3 valve closed
8/19/2011	3:04:14 PM	PH3 valve closed
8/19/2011	3:04:14 PM	SiCl4 pre valve closed
8/19/2011	3:04:14 PM	SiCl4 post valve closed
8/19/2011	3:04:14 PM	Bypass valve closed
8/19/2011	3:04:14 PM	Bubbler valve closed
8/19/2011	3:04:14 PM	Helium valve opened
8/19/2011	3:04:14 PM	Main Vac valve opened
8/19/2011	3:04:14 PM	Helium MFC set to  20.000000
8/19/2011	3:04:14 PM	H2 MFC set to  0.000000
8/19/2011	3:04:14 PM	BCl3 MFC set to  0.000000
8/19/2011	3:04:14 PM	PHl3 MFC set to  0.000000
8/19/2011	3:04:14 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:04:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:04:14 PM	Tube furnace set to 150
8/19/2011	3:04:44 PM	Helium valve closed
8/19/2011	3:04:44 PM	H2 valve closed
8/19/2011	3:04:44 PM	BCl3 valve closed
8/19/2011	3:04:44 PM	PH3 valve closed
8/19/2011	3:04:44 PM	SiCl4 pre valve closed
8/19/2011	3:04:44 PM	SiCl4 post valve closed
8/19/2011	3:04:44 PM	Bypass valve closed
8/19/2011	3:04:44 PM	Bubbler valve closed
8/19/2011	3:04:44 PM	Main Vac valve opened
8/19/2011	3:04:44 PM	Helium MFC set to  0.000000
8/19/2011	3:04:44 PM	H2 MFC set to  0.000000
8/19/2011	3:04:44 PM	BCl3 MFC set to  0.000000
8/19/2011	3:04:44 PM	PHl3 MFC set to  0.000000
8/19/2011	3:04:44 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:04:44 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:04:44 PM	Tube furnace set to 150
8/19/2011	3:05:14 PM	H2 valve closed
8/19/2011	3:05:14 PM	BCl3 valve closed
8/19/2011	3:05:14 PM	PH3 valve closed
8/19/2011	3:05:14 PM	SiCl4 pre valve closed
8/19/2011	3:05:14 PM	SiCl4 post valve closed
8/19/2011	3:05:14 PM	Bypass valve closed
8/19/2011	3:05:14 PM	Bubbler valve closed
8/19/2011	3:05:14 PM	Helium valve opened
8/19/2011	3:05:14 PM	Main Vac valve opened
8/19/2011	3:05:14 PM	Helium MFC set to  20.000000
8/19/2011	3:05:14 PM	H2 MFC set to  0.000000
8/19/2011	3:05:14 PM	BCl3 MFC set to  0.000000
8/19/2011	3:05:14 PM	PHl3 MFC set to  0.000000
8/19/2011	3:05:14 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:05:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:05:15 PM	Tube furnace set to 150
8/19/2011	3:05:45 PM	Helium valve closed
8/19/2011	3:05:45 PM	H2 valve closed
8/19/2011	3:05:45 PM	BCl3 valve closed
8/19/2011	3:05:45 PM	PH3 valve closed
8/19/2011	3:05:45 PM	SiCl4 pre valve closed
8/19/2011	3:05:45 PM	SiCl4 post valve closed
8/19/2011	3:05:45 PM	Bypass valve closed
8/19/2011	3:05:45 PM	Bubbler valve closed
8/19/2011	3:05:45 PM	Main Vac valve opened
8/19/2011	3:05:45 PM	Helium MFC set to  0.000000
8/19/2011	3:05:45 PM	H2 MFC set to  0.000000
8/19/2011	3:05:45 PM	BCl3 MFC set to  0.000000
8/19/2011	3:05:45 PM	PHl3 MFC set to  0.000000
8/19/2011	3:05:45 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:05:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:05:45 PM	Tube furnace set to 150
8/19/2011	3:06:15 PM	H2 valve closed
8/19/2011	3:06:15 PM	BCl3 valve closed
8/19/2011	3:06:15 PM	PH3 valve closed
8/19/2011	3:06:15 PM	SiCl4 pre valve closed
8/19/2011	3:06:15 PM	SiCl4 post valve closed
8/19/2011	3:06:15 PM	Bypass valve closed
8/19/2011	3:06:15 PM	Bubbler valve closed
8/19/2011	3:06:15 PM	Helium valve opened
8/19/2011	3:06:15 PM	Main Vac valve opened
8/19/2011	3:06:15 PM	Helium MFC set to  20.000000
8/19/2011	3:06:15 PM	H2 MFC set to  0.000000
8/19/2011	3:06:15 PM	BCl3 MFC set to  0.000000
8/19/2011	3:06:15 PM	PHl3 MFC set to  0.000000
8/19/2011	3:06:15 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:06:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:06:15 PM	Tube furnace set to 150
8/19/2011	3:06:45 PM	Helium valve closed
8/19/2011	3:06:45 PM	H2 valve closed
8/19/2011	3:06:45 PM	BCl3 valve closed
8/19/2011	3:06:45 PM	PH3 valve closed
8/19/2011	3:06:45 PM	SiCl4 pre valve closed
8/19/2011	3:06:45 PM	SiCl4 post valve closed
8/19/2011	3:06:45 PM	Bypass valve closed
8/19/2011	3:06:45 PM	Bubbler valve closed
8/19/2011	3:06:45 PM	Main Vac valve opened
8/19/2011	3:06:45 PM	Helium MFC set to  0.000000
8/19/2011	3:06:45 PM	H2 MFC set to  0.000000
8/19/2011	3:06:45 PM	BCl3 MFC set to  0.000000
8/19/2011	3:06:45 PM	PHl3 MFC set to  0.000000
8/19/2011	3:06:45 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:06:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:06:45 PM	Tube furnace set to 150
8/19/2011	3:07:15 PM	H2 valve closed
8/19/2011	3:07:15 PM	BCl3 valve closed
8/19/2011	3:07:15 PM	PH3 valve closed
8/19/2011	3:07:15 PM	SiCl4 pre valve closed
8/19/2011	3:07:15 PM	SiCl4 post valve closed
8/19/2011	3:07:15 PM	Bypass valve closed
8/19/2011	3:07:15 PM	Bubbler valve closed
8/19/2011	3:07:15 PM	Helium valve opened
8/19/2011	3:07:15 PM	Main Vac valve opened
8/19/2011	3:07:15 PM	Helium MFC set to  20.000000
8/19/2011	3:07:15 PM	H2 MFC set to  0.000000
8/19/2011	3:07:15 PM	BCl3 MFC set to  0.000000
8/19/2011	3:07:15 PM	PHl3 MFC set to  0.000000
8/19/2011	3:07:15 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:07:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:07:16 PM	Tube furnace set to 150
8/19/2011	3:07:46 PM	Helium valve closed
8/19/2011	3:07:46 PM	H2 valve closed
8/19/2011	3:07:46 PM	BCl3 valve closed
8/19/2011	3:07:46 PM	PH3 valve closed
8/19/2011	3:07:46 PM	SiCl4 pre valve closed
8/19/2011	3:07:46 PM	SiCl4 post valve closed
8/19/2011	3:07:46 PM	Bypass valve closed
8/19/2011	3:07:46 PM	Bubbler valve closed
8/19/2011	3:07:46 PM	Main Vac valve opened
8/19/2011	3:07:46 PM	Helium MFC set to  0.000000
8/19/2011	3:07:46 PM	H2 MFC set to  0.000000
8/19/2011	3:07:46 PM	BCl3 MFC set to  0.000000
8/19/2011	3:07:46 PM	PHl3 MFC set to  0.000000
8/19/2011	3:07:46 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:07:46 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:07:46 PM	Tube furnace set to 150
8/19/2011	3:08:16 PM	H2 valve closed
8/19/2011	3:08:16 PM	BCl3 valve closed
8/19/2011	3:08:16 PM	PH3 valve closed
8/19/2011	3:08:16 PM	SiCl4 pre valve closed
8/19/2011	3:08:16 PM	SiCl4 post valve closed
8/19/2011	3:08:16 PM	Bypass valve closed
8/19/2011	3:08:16 PM	Bubbler valve closed
8/19/2011	3:08:16 PM	Helium valve opened
8/19/2011	3:08:16 PM	Main Vac valve opened
8/19/2011	3:08:16 PM	Helium MFC set to  20.000000
8/19/2011	3:08:16 PM	H2 MFC set to  0.000000
8/19/2011	3:08:16 PM	BCl3 MFC set to  0.000000
8/19/2011	3:08:16 PM	PHl3 MFC set to  0.000000
8/19/2011	3:08:16 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:08:16 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:08:16 PM	Tube furnace set to 150
8/19/2011	3:08:46 PM	Helium valve closed
8/19/2011	3:08:46 PM	H2 valve closed
8/19/2011	3:08:46 PM	BCl3 valve closed
8/19/2011	3:08:46 PM	PH3 valve closed
8/19/2011	3:08:46 PM	SiCl4 pre valve closed
8/19/2011	3:08:46 PM	SiCl4 post valve closed
8/19/2011	3:08:46 PM	Bypass valve closed
8/19/2011	3:08:46 PM	Bubbler valve closed
8/19/2011	3:08:46 PM	Main Vac valve opened
8/19/2011	3:08:46 PM	Helium MFC set to  0.000000
8/19/2011	3:08:46 PM	H2 MFC set to  0.000000
8/19/2011	3:08:46 PM	BCl3 MFC set to  0.000000
8/19/2011	3:08:46 PM	PHl3 MFC set to  0.000000
8/19/2011	3:08:46 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:08:46 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:08:46 PM	Tube furnace set to 150
8/19/2011	3:09:16 PM	H2 valve closed
8/19/2011	3:09:16 PM	BCl3 valve closed
8/19/2011	3:09:16 PM	PH3 valve closed
8/19/2011	3:09:16 PM	SiCl4 pre valve closed
8/19/2011	3:09:16 PM	SiCl4 post valve closed
8/19/2011	3:09:16 PM	Bypass valve closed
8/19/2011	3:09:16 PM	Bubbler valve closed
8/19/2011	3:09:16 PM	Helium valve opened
8/19/2011	3:09:16 PM	Main Vac valve opened
8/19/2011	3:09:16 PM	Helium MFC set to  20.000000
8/19/2011	3:09:16 PM	H2 MFC set to  0.000000
8/19/2011	3:09:16 PM	BCl3 MFC set to  0.000000
8/19/2011	3:09:16 PM	PHl3 MFC set to  0.000000
8/19/2011	3:09:16 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:09:16 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:09:16 PM	Tube furnace set to 150
8/19/2011	3:09:46 PM	Helium valve closed
8/19/2011	3:09:46 PM	H2 valve closed
8/19/2011	3:09:46 PM	BCl3 valve closed
8/19/2011	3:09:46 PM	PH3 valve closed
8/19/2011	3:09:46 PM	SiCl4 pre valve closed
8/19/2011	3:09:46 PM	SiCl4 post valve closed
8/19/2011	3:09:46 PM	Bypass valve closed
8/19/2011	3:09:46 PM	Bubbler valve closed
8/19/2011	3:09:46 PM	Main Vac valve opened
8/19/2011	3:09:46 PM	Helium MFC set to  0.000000
8/19/2011	3:09:46 PM	H2 MFC set to  0.000000
8/19/2011	3:09:46 PM	BCl3 MFC set to  0.000000
8/19/2011	3:09:46 PM	PHl3 MFC set to  0.000000
8/19/2011	3:09:46 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:09:46 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:09:47 PM	Tube furnace set to 150
8/19/2011	3:09:48 PM	Run finished at 3:09 PM
8/19/2011	3:11:01 PM	Recipe started at 3:11 PM
8/19/2011	3:11:01 PM	Helium valve closed
8/19/2011	3:11:01 PM	H2 valve closed
8/19/2011	3:11:01 PM	BCl3 valve closed
8/19/2011	3:11:01 PM	PH3 valve closed
8/19/2011	3:11:01 PM	SiCl4 pre valve closed
8/19/2011	3:11:01 PM	SiCl4 post valve closed
8/19/2011	3:11:01 PM	Main Vac valve closed
8/19/2011	3:11:01 PM	Bypass valve closed
8/19/2011	3:11:01 PM	Bubbler valve closed
8/19/2011	3:11:01 PM	Helium MFC set to  0.000000
8/19/2011	3:11:01 PM	H2 MFC set to  0.000000
8/19/2011	3:11:01 PM	BCl3 MFC set to  0.000000
8/19/2011	3:11:01 PM	PHl3 MFC set to  0.000000
8/19/2011	3:11:01 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:11:01 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:11:01 PM	Tube furnace set to 0
8/19/2011	3:11:04 PM	Helium valve closed
8/19/2011	3:11:04 PM	BCl3 valve closed
8/19/2011	3:11:04 PM	PH3 valve closed
8/19/2011	3:11:04 PM	SiCl4 pre valve closed
8/19/2011	3:11:04 PM	SiCl4 post valve closed
8/19/2011	3:11:04 PM	Main Vac valve closed
8/19/2011	3:11:04 PM	Bypass valve closed
8/19/2011	3:11:04 PM	Bubbler valve closed
8/19/2011	3:11:04 PM	H2 valve opened
8/19/2011	3:11:04 PM	Helium MFC set to  0.000000
8/19/2011	3:11:04 PM	H2 MFC set to  500.000000
8/19/2011	3:11:04 PM	BCl3 MFC set to  0.000000
8/19/2011	3:11:04 PM	PHl3 MFC set to  0.000000
8/19/2011	3:11:04 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:11:04 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:11:04 PM	Tube furnace set to 0
8/19/2011	3:12:07 PM	Helium valve closed
8/19/2011	3:12:07 PM	BCl3 valve closed
8/19/2011	3:12:07 PM	PH3 valve closed
8/19/2011	3:12:07 PM	SiCl4 pre valve closed
8/19/2011	3:12:07 PM	SiCl4 post valve closed
8/19/2011	3:12:07 PM	Main Vac valve closed
8/19/2011	3:12:07 PM	Bypass valve closed
8/19/2011	3:12:07 PM	H2 valve opened
8/19/2011	3:12:07 PM	Bubbler valve opened
8/19/2011	3:12:07 PM	Helium MFC set to  0.000000
8/19/2011	3:12:07 PM	H2 MFC set to  500.000000
8/19/2011	3:12:07 PM	BCl3 MFC set to  0.000000
8/19/2011	3:12:07 PM	PHl3 MFC set to  0.000000
8/19/2011	3:12:07 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:12:08 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:12:08 PM	Tube furnace set to 0
8/19/2011	3:12:09 PM	Helium valve closed
8/19/2011	3:12:09 PM	BCl3 valve closed
8/19/2011	3:12:09 PM	PH3 valve closed
8/19/2011	3:12:09 PM	SiCl4 pre valve closed
8/19/2011	3:12:09 PM	SiCl4 post valve closed
8/19/2011	3:12:09 PM	Main Vac valve closed
8/19/2011	3:12:09 PM	Bypass valve closed
8/19/2011	3:12:09 PM	H2 valve opened
8/19/2011	3:12:09 PM	Bubbler valve opened
8/19/2011	3:12:09 PM	Helium MFC set to  0.000000
8/19/2011	3:12:09 PM	H2 MFC set to  500.000000
8/19/2011	3:12:09 PM	BCl3 MFC set to  0.000000
8/19/2011	3:12:09 PM	PHl3 MFC set to  0.000000
8/19/2011	3:12:09 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:12:09 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:12:09 PM	Tube furnace set to 1000
8/19/2011	3:32:09 PM	Helium valve closed
8/19/2011	3:32:09 PM	PH3 valve closed
8/19/2011	3:32:09 PM	Main Vac valve closed
8/19/2011	3:32:09 PM	Bypass valve closed
8/19/2011	3:32:09 PM	H2 valve opened
8/19/2011	3:32:09 PM	BCl3 valve opened
8/19/2011	3:32:09 PM	SiCl4 pre valve opened
8/19/2011	3:32:09 PM	SiCl4 post valve opened
8/19/2011	3:32:09 PM	Bubbler valve opened
8/19/2011	3:32:09 PM	Helium MFC set to  0.000000
8/19/2011	3:32:09 PM	H2 MFC set to  500.000000
8/19/2011	3:32:09 PM	BCl3 MFC set to  2.400000
8/19/2011	3:32:09 PM	PHl3 MFC set to  0.000000
8/19/2011	3:32:09 PM	SiCl4 MFC set to  50.000000
8/19/2011	3:32:09 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:32:09 PM	Tube furnace set to 1000
8/19/2011	3:48:49 PM	Helium valve closed
8/19/2011	3:48:49 PM	BCl3 valve closed
8/19/2011	3:48:49 PM	PH3 valve closed
8/19/2011	3:48:49 PM	SiCl4 pre valve closed
8/19/2011	3:48:49 PM	SiCl4 post valve closed
8/19/2011	3:48:49 PM	Main Vac valve closed
8/19/2011	3:48:49 PM	Bypass valve closed
8/19/2011	3:48:49 PM	H2 valve opened
8/19/2011	3:48:49 PM	Bubbler valve opened
8/19/2011	3:48:49 PM	Helium MFC set to  0.000000
8/19/2011	3:48:49 PM	H2 MFC set to  500.000000
8/19/2011	3:48:49 PM	BCl3 MFC set to  0.000000
8/19/2011	3:48:49 PM	PHl3 MFC set to  0.000000
8/19/2011	3:48:49 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:48:49 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:48:49 PM	Tube furnace set to 750
8/19/2011	3:53:49 PM	H2 valve closed
8/19/2011	3:53:49 PM	BCl3 valve closed
8/19/2011	3:53:49 PM	PH3 valve closed
8/19/2011	3:53:49 PM	SiCl4 pre valve closed
8/19/2011	3:53:49 PM	SiCl4 post valve closed
8/19/2011	3:53:49 PM	Main Vac valve closed
8/19/2011	3:53:49 PM	Bypass valve closed
8/19/2011	3:53:49 PM	Helium valve opened
8/19/2011	3:53:49 PM	Bubbler valve opened
8/19/2011	3:53:49 PM	Helium MFC set to  500.000000
8/19/2011	3:53:49 PM	H2 MFC set to  0.000000
8/19/2011	3:53:49 PM	BCl3 MFC set to  0.000000
8/19/2011	3:53:49 PM	PHl3 MFC set to  0.000000
8/19/2011	3:53:49 PM	SiCl4 MFC set to  0.000000
8/19/2011	3:53:49 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	3:53:49 PM	Tube furnace set to 0
8/19/2011	4:13:49 PM	Helium valve closed
8/19/2011	4:13:49 PM	H2 valve closed
8/19/2011	4:13:49 PM	BCl3 valve closed
8/19/2011	4:13:49 PM	PH3 valve closed
8/19/2011	4:13:49 PM	SiCl4 pre valve closed
8/19/2011	4:13:49 PM	SiCl4 post valve closed
8/19/2011	4:13:49 PM	Main Vac valve closed
8/19/2011	4:13:49 PM	Bypass valve closed
8/19/2011	4:13:49 PM	Bubbler valve closed
8/19/2011	4:13:49 PM	Helium MFC set to  0.000000
8/19/2011	4:13:49 PM	H2 MFC set to  0.000000
8/19/2011	4:13:49 PM	BCl3 MFC set to  0.000000
8/19/2011	4:13:49 PM	PHl3 MFC set to  0.000000
8/19/2011	4:13:49 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:13:49 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:13:49 PM	Tube furnace set to 0
8/19/2011	4:13:50 PM	Run finished at 4:13 PM
8/19/2011	4:21:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2011	4:21:57 PM	Recipe started at 4:21 PM
8/19/2011	4:21:57 PM	Helium valve closed
8/19/2011	4:21:57 PM	H2 valve closed
8/19/2011	4:21:57 PM	BCl3 valve closed
8/19/2011	4:21:57 PM	PH3 valve closed
8/19/2011	4:21:57 PM	SiCl4 pre valve closed
8/19/2011	4:21:57 PM	SiCl4 post valve closed
8/19/2011	4:21:57 PM	Main Vac valve closed
8/19/2011	4:21:57 PM	Bypass valve closed
8/19/2011	4:21:57 PM	Bubbler valve closed
8/19/2011	4:21:57 PM	Helium MFC set to  0.000000
8/19/2011	4:21:57 PM	H2 MFC set to  0.000000
8/19/2011	4:21:57 PM	BCl3 MFC set to  0.000000
8/19/2011	4:21:57 PM	PHl3 MFC set to  0.000000
8/19/2011	4:21:57 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:21:57 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:21:57 PM	Tube furnace set to 0
8/19/2011	4:22:00 PM	H2 valve closed
8/19/2011	4:22:00 PM	BCl3 valve closed
8/19/2011	4:22:00 PM	PH3 valve closed
8/19/2011	4:22:00 PM	SiCl4 pre valve closed
8/19/2011	4:22:00 PM	SiCl4 post valve closed
8/19/2011	4:22:00 PM	Main Vac valve closed
8/19/2011	4:22:00 PM	Bypass valve closed
8/19/2011	4:22:00 PM	Bubbler valve closed
8/19/2011	4:22:00 PM	Helium valve opened
8/19/2011	4:22:00 PM	Helium MFC set to  500.000000
8/19/2011	4:22:00 PM	H2 MFC set to  0.000000
8/19/2011	4:22:00 PM	BCl3 MFC set to  0.000000
8/19/2011	4:22:00 PM	PHl3 MFC set to  0.000000
8/19/2011	4:22:00 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:22:00 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:22:00 PM	Tube furnace set to 0
8/19/2011	4:22:00 PM	Helium valve closed
8/19/2011	4:22:00 PM	H2 valve closed
8/19/2011	4:22:00 PM	BCl3 valve closed
8/19/2011	4:22:00 PM	PH3 valve closed
8/19/2011	4:22:00 PM	SiCl4 pre valve closed
8/19/2011	4:22:00 PM	SiCl4 post valve closed
8/19/2011	4:22:00 PM	Main Vac valve closed
8/19/2011	4:22:00 PM	Bypass valve closed
8/19/2011	4:22:00 PM	Bubbler valve closed
8/19/2011	4:22:00 PM	Helium MFC set to  0.000000
8/19/2011	4:22:00 PM	H2 MFC set to  0.000000
8/19/2011	4:22:00 PM	BCl3 MFC set to  0.000000
8/19/2011	4:22:00 PM	PHl3 MFC set to  0.000000
8/19/2011	4:22:00 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:22:00 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:22:01 PM	Tube furnace set to 0
8/19/2011	4:22:02 PM	Run finished at 4:22 PM
8/19/2011	4:22:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2011	4:29:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2011	4:29:19 PM	Recipe started at 4:29 PM
8/19/2011	4:29:19 PM	Helium valve closed
8/19/2011	4:29:19 PM	H2 valve closed
8/19/2011	4:29:19 PM	BCl3 valve closed
8/19/2011	4:29:19 PM	PH3 valve closed
8/19/2011	4:29:19 PM	SiCl4 pre valve closed
8/19/2011	4:29:19 PM	SiCl4 post valve closed
8/19/2011	4:29:19 PM	Main Vac valve closed
8/19/2011	4:29:19 PM	Bubbler valve closed
8/19/2011	4:29:19 PM	Bypass valve opened
8/19/2011	4:29:19 PM	Helium MFC set to  0.000000
8/19/2011	4:29:19 PM	H2 MFC set to  0.000000
8/19/2011	4:29:19 PM	BCl3 MFC set to  0.000000
8/19/2011	4:29:19 PM	PHl3 MFC set to  0.000000
8/19/2011	4:29:19 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:29:19 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:29:19 PM	Tube furnace set to 0
8/19/2011	4:30:29 PM	Helium valve closed
8/19/2011	4:30:29 PM	H2 valve closed
8/19/2011	4:30:29 PM	BCl3 valve closed
8/19/2011	4:30:29 PM	PH3 valve closed
8/19/2011	4:30:29 PM	SiCl4 pre valve closed
8/19/2011	4:30:29 PM	SiCl4 post valve closed
8/19/2011	4:30:29 PM	Main Vac valve closed
8/19/2011	4:30:29 PM	Bubbler valve closed
8/19/2011	4:30:29 PM	Bypass valve opened
8/19/2011	4:30:29 PM	Helium MFC set to  0.000000
8/19/2011	4:30:29 PM	H2 MFC set to  0.000000
8/19/2011	4:30:29 PM	BCl3 MFC set to  0.000000
8/19/2011	4:30:29 PM	PHl3 MFC set to  0.000000
8/19/2011	4:30:29 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:30:29 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:30:29 PM	Tube furnace set to 0
8/19/2011	4:31:29 PM	Helium valve closed
8/19/2011	4:31:29 PM	H2 valve closed
8/19/2011	4:31:29 PM	BCl3 valve closed
8/19/2011	4:31:29 PM	PH3 valve closed
8/19/2011	4:31:29 PM	SiCl4 pre valve closed
8/19/2011	4:31:29 PM	SiCl4 post valve closed
8/19/2011	4:31:29 PM	Bypass valve closed
8/19/2011	4:31:29 PM	Bubbler valve closed
8/19/2011	4:31:29 PM	Main Vac valve opened
8/19/2011	4:31:29 PM	Helium MFC set to  0.000000
8/19/2011	4:31:29 PM	H2 MFC set to  0.000000
8/19/2011	4:31:29 PM	BCl3 MFC set to  0.000000
8/19/2011	4:31:29 PM	PHl3 MFC set to  0.000000
8/19/2011	4:31:29 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:31:29 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:31:29 PM	Tube furnace set to 0
8/19/2011	4:31:30 PM	Run finished at 4:31 PM
8/19/2011	4:31:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2011	4:53:42 PM	Recipe started at 4:53 PM
8/19/2011	4:53:42 PM	Helium valve closed
8/19/2011	4:53:42 PM	H2 valve closed
8/19/2011	4:53:42 PM	BCl3 valve closed
8/19/2011	4:53:42 PM	PH3 valve closed
8/19/2011	4:53:42 PM	SiCl4 pre valve closed
8/19/2011	4:53:42 PM	SiCl4 post valve closed
8/19/2011	4:53:42 PM	Bypass valve closed
8/19/2011	4:53:42 PM	Bubbler valve closed
8/19/2011	4:53:42 PM	Main Vac valve opened
8/19/2011	4:53:42 PM	Helium MFC set to  0.000000
8/19/2011	4:53:42 PM	H2 MFC set to  0.000000
8/19/2011	4:53:42 PM	BCl3 MFC set to  0.000000
8/19/2011	4:53:42 PM	PHl3 MFC set to  0.000000
8/19/2011	4:53:42 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:53:42 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:53:42 PM	Tube furnace set to 150
8/19/2011	4:54:12 PM	H2 valve closed
8/19/2011	4:54:12 PM	BCl3 valve closed
8/19/2011	4:54:12 PM	PH3 valve closed
8/19/2011	4:54:12 PM	SiCl4 pre valve closed
8/19/2011	4:54:12 PM	SiCl4 post valve closed
8/19/2011	4:54:12 PM	Bypass valve closed
8/19/2011	4:54:12 PM	Bubbler valve closed
8/19/2011	4:54:12 PM	Helium valve opened
8/19/2011	4:54:12 PM	Main Vac valve opened
8/19/2011	4:54:12 PM	Helium MFC set to  20.000000
8/19/2011	4:54:12 PM	H2 MFC set to  0.000000
8/19/2011	4:54:12 PM	BCl3 MFC set to  0.000000
8/19/2011	4:54:12 PM	PHl3 MFC set to  0.000000
8/19/2011	4:54:12 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:54:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:54:12 PM	Tube furnace set to 150
8/19/2011	4:54:42 PM	Helium valve closed
8/19/2011	4:54:42 PM	H2 valve closed
8/19/2011	4:54:42 PM	BCl3 valve closed
8/19/2011	4:54:42 PM	PH3 valve closed
8/19/2011	4:54:42 PM	SiCl4 pre valve closed
8/19/2011	4:54:42 PM	SiCl4 post valve closed
8/19/2011	4:54:42 PM	Bypass valve closed
8/19/2011	4:54:42 PM	Bubbler valve closed
8/19/2011	4:54:42 PM	Main Vac valve opened
8/19/2011	4:54:42 PM	Helium MFC set to  0.000000
8/19/2011	4:54:42 PM	H2 MFC set to  0.000000
8/19/2011	4:54:42 PM	BCl3 MFC set to  0.000000
8/19/2011	4:54:42 PM	PHl3 MFC set to  0.000000
8/19/2011	4:54:42 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:54:42 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:54:42 PM	Tube furnace set to 150
8/19/2011	4:55:12 PM	H2 valve closed
8/19/2011	4:55:12 PM	BCl3 valve closed
8/19/2011	4:55:12 PM	PH3 valve closed
8/19/2011	4:55:12 PM	SiCl4 pre valve closed
8/19/2011	4:55:12 PM	SiCl4 post valve closed
8/19/2011	4:55:12 PM	Bypass valve closed
8/19/2011	4:55:12 PM	Bubbler valve closed
8/19/2011	4:55:12 PM	Helium valve opened
8/19/2011	4:55:12 PM	Main Vac valve opened
8/19/2011	4:55:12 PM	Helium MFC set to  20.000000
8/19/2011	4:55:12 PM	H2 MFC set to  0.000000
8/19/2011	4:55:12 PM	BCl3 MFC set to  0.000000
8/19/2011	4:55:12 PM	PHl3 MFC set to  0.000000
8/19/2011	4:55:12 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:55:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:55:12 PM	Tube furnace set to 150
8/19/2011	4:55:42 PM	Helium valve closed
8/19/2011	4:55:42 PM	H2 valve closed
8/19/2011	4:55:42 PM	BCl3 valve closed
8/19/2011	4:55:42 PM	PH3 valve closed
8/19/2011	4:55:42 PM	SiCl4 pre valve closed
8/19/2011	4:55:42 PM	SiCl4 post valve closed
8/19/2011	4:55:42 PM	Bypass valve closed
8/19/2011	4:55:42 PM	Bubbler valve closed
8/19/2011	4:55:42 PM	Main Vac valve opened
8/19/2011	4:55:42 PM	Helium MFC set to  0.000000
8/19/2011	4:55:42 PM	H2 MFC set to  0.000000
8/19/2011	4:55:42 PM	BCl3 MFC set to  0.000000
8/19/2011	4:55:42 PM	PHl3 MFC set to  0.000000
8/19/2011	4:55:42 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:55:42 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:55:43 PM	Tube furnace set to 150
8/19/2011	4:56:13 PM	H2 valve closed
8/19/2011	4:56:13 PM	BCl3 valve closed
8/19/2011	4:56:13 PM	PH3 valve closed
8/19/2011	4:56:13 PM	SiCl4 pre valve closed
8/19/2011	4:56:13 PM	SiCl4 post valve closed
8/19/2011	4:56:13 PM	Bypass valve closed
8/19/2011	4:56:13 PM	Bubbler valve closed
8/19/2011	4:56:13 PM	Helium valve opened
8/19/2011	4:56:13 PM	Main Vac valve opened
8/19/2011	4:56:13 PM	Helium MFC set to  20.000000
8/19/2011	4:56:13 PM	H2 MFC set to  0.000000
8/19/2011	4:56:13 PM	BCl3 MFC set to  0.000000
8/19/2011	4:56:13 PM	PHl3 MFC set to  0.000000
8/19/2011	4:56:13 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:56:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:56:13 PM	Tube furnace set to 150
8/19/2011	4:56:43 PM	Helium valve closed
8/19/2011	4:56:43 PM	H2 valve closed
8/19/2011	4:56:43 PM	BCl3 valve closed
8/19/2011	4:56:43 PM	PH3 valve closed
8/19/2011	4:56:43 PM	SiCl4 pre valve closed
8/19/2011	4:56:43 PM	SiCl4 post valve closed
8/19/2011	4:56:43 PM	Bypass valve closed
8/19/2011	4:56:43 PM	Bubbler valve closed
8/19/2011	4:56:43 PM	Main Vac valve opened
8/19/2011	4:56:43 PM	Helium MFC set to  0.000000
8/19/2011	4:56:43 PM	H2 MFC set to  0.000000
8/19/2011	4:56:43 PM	BCl3 MFC set to  0.000000
8/19/2011	4:56:43 PM	PHl3 MFC set to  0.000000
8/19/2011	4:56:43 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:56:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:56:43 PM	Tube furnace set to 150
8/19/2011	4:57:13 PM	H2 valve closed
8/19/2011	4:57:13 PM	BCl3 valve closed
8/19/2011	4:57:13 PM	PH3 valve closed
8/19/2011	4:57:13 PM	SiCl4 pre valve closed
8/19/2011	4:57:13 PM	SiCl4 post valve closed
8/19/2011	4:57:13 PM	Bypass valve closed
8/19/2011	4:57:13 PM	Bubbler valve closed
8/19/2011	4:57:13 PM	Helium valve opened
8/19/2011	4:57:13 PM	Main Vac valve opened
8/19/2011	4:57:13 PM	Helium MFC set to  20.000000
8/19/2011	4:57:13 PM	H2 MFC set to  0.000000
8/19/2011	4:57:13 PM	BCl3 MFC set to  0.000000
8/19/2011	4:57:13 PM	PHl3 MFC set to  0.000000
8/19/2011	4:57:13 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:57:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:57:13 PM	Tube furnace set to 150
8/19/2011	4:57:43 PM	Helium valve closed
8/19/2011	4:57:43 PM	H2 valve closed
8/19/2011	4:57:43 PM	BCl3 valve closed
8/19/2011	4:57:43 PM	PH3 valve closed
8/19/2011	4:57:43 PM	SiCl4 pre valve closed
8/19/2011	4:57:43 PM	SiCl4 post valve closed
8/19/2011	4:57:43 PM	Bypass valve closed
8/19/2011	4:57:43 PM	Bubbler valve closed
8/19/2011	4:57:43 PM	Main Vac valve opened
8/19/2011	4:57:43 PM	Helium MFC set to  0.000000
8/19/2011	4:57:43 PM	H2 MFC set to  0.000000
8/19/2011	4:57:43 PM	BCl3 MFC set to  0.000000
8/19/2011	4:57:43 PM	PHl3 MFC set to  0.000000
8/19/2011	4:57:43 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:57:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:57:43 PM	Tube furnace set to 150
8/19/2011	4:58:13 PM	H2 valve closed
8/19/2011	4:58:13 PM	BCl3 valve closed
8/19/2011	4:58:13 PM	PH3 valve closed
8/19/2011	4:58:13 PM	SiCl4 pre valve closed
8/19/2011	4:58:13 PM	SiCl4 post valve closed
8/19/2011	4:58:13 PM	Bypass valve closed
8/19/2011	4:58:13 PM	Bubbler valve closed
8/19/2011	4:58:13 PM	Helium valve opened
8/19/2011	4:58:13 PM	Main Vac valve opened
8/19/2011	4:58:13 PM	Helium MFC set to  20.000000
8/19/2011	4:58:13 PM	H2 MFC set to  0.000000
8/19/2011	4:58:13 PM	BCl3 MFC set to  0.000000
8/19/2011	4:58:13 PM	PHl3 MFC set to  0.000000
8/19/2011	4:58:13 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:58:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:58:14 PM	Tube furnace set to 150
8/19/2011	4:58:44 PM	Helium valve closed
8/19/2011	4:58:44 PM	H2 valve closed
8/19/2011	4:58:44 PM	BCl3 valve closed
8/19/2011	4:58:44 PM	PH3 valve closed
8/19/2011	4:58:44 PM	SiCl4 pre valve closed
8/19/2011	4:58:44 PM	SiCl4 post valve closed
8/19/2011	4:58:44 PM	Bypass valve closed
8/19/2011	4:58:44 PM	Bubbler valve closed
8/19/2011	4:58:44 PM	Main Vac valve opened
8/19/2011	4:58:44 PM	Helium MFC set to  0.000000
8/19/2011	4:58:44 PM	H2 MFC set to  0.000000
8/19/2011	4:58:44 PM	BCl3 MFC set to  0.000000
8/19/2011	4:58:44 PM	PHl3 MFC set to  0.000000
8/19/2011	4:58:44 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:58:44 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:58:44 PM	Tube furnace set to 150
8/19/2011	4:59:14 PM	H2 valve closed
8/19/2011	4:59:14 PM	BCl3 valve closed
8/19/2011	4:59:14 PM	PH3 valve closed
8/19/2011	4:59:14 PM	SiCl4 pre valve closed
8/19/2011	4:59:14 PM	SiCl4 post valve closed
8/19/2011	4:59:14 PM	Bypass valve closed
8/19/2011	4:59:14 PM	Bubbler valve closed
8/19/2011	4:59:14 PM	Helium valve opened
8/19/2011	4:59:14 PM	Main Vac valve opened
8/19/2011	4:59:14 PM	Helium MFC set to  20.000000
8/19/2011	4:59:14 PM	H2 MFC set to  0.000000
8/19/2011	4:59:14 PM	BCl3 MFC set to  0.000000
8/19/2011	4:59:14 PM	PHl3 MFC set to  0.000000
8/19/2011	4:59:14 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:59:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:59:14 PM	Tube furnace set to 150
8/19/2011	4:59:44 PM	Helium valve closed
8/19/2011	4:59:44 PM	H2 valve closed
8/19/2011	4:59:44 PM	BCl3 valve closed
8/19/2011	4:59:44 PM	PH3 valve closed
8/19/2011	4:59:44 PM	SiCl4 pre valve closed
8/19/2011	4:59:44 PM	SiCl4 post valve closed
8/19/2011	4:59:44 PM	Bypass valve closed
8/19/2011	4:59:44 PM	Bubbler valve closed
8/19/2011	4:59:44 PM	Main Vac valve opened
8/19/2011	4:59:44 PM	Helium MFC set to  0.000000
8/19/2011	4:59:44 PM	H2 MFC set to  0.000000
8/19/2011	4:59:44 PM	BCl3 MFC set to  0.000000
8/19/2011	4:59:44 PM	PHl3 MFC set to  0.000000
8/19/2011	4:59:44 PM	SiCl4 MFC set to  0.000000
8/19/2011	4:59:44 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	4:59:44 PM	Tube furnace set to 150
8/19/2011	5:00:14 PM	H2 valve closed
8/19/2011	5:00:14 PM	BCl3 valve closed
8/19/2011	5:00:14 PM	PH3 valve closed
8/19/2011	5:00:14 PM	SiCl4 pre valve closed
8/19/2011	5:00:14 PM	SiCl4 post valve closed
8/19/2011	5:00:14 PM	Bypass valve closed
8/19/2011	5:00:14 PM	Bubbler valve closed
8/19/2011	5:00:14 PM	Helium valve opened
8/19/2011	5:00:14 PM	Main Vac valve opened
8/19/2011	5:00:14 PM	Helium MFC set to  20.000000
8/19/2011	5:00:14 PM	H2 MFC set to  0.000000
8/19/2011	5:00:14 PM	BCl3 MFC set to  0.000000
8/19/2011	5:00:14 PM	PHl3 MFC set to  0.000000
8/19/2011	5:00:14 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:00:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:00:14 PM	Tube furnace set to 150
8/19/2011	5:00:44 PM	Helium valve closed
8/19/2011	5:00:44 PM	H2 valve closed
8/19/2011	5:00:44 PM	BCl3 valve closed
8/19/2011	5:00:44 PM	PH3 valve closed
8/19/2011	5:00:44 PM	SiCl4 pre valve closed
8/19/2011	5:00:44 PM	SiCl4 post valve closed
8/19/2011	5:00:44 PM	Bypass valve closed
8/19/2011	5:00:44 PM	Bubbler valve closed
8/19/2011	5:00:44 PM	Main Vac valve opened
8/19/2011	5:00:44 PM	Helium MFC set to  0.000000
8/19/2011	5:00:44 PM	H2 MFC set to  0.000000
8/19/2011	5:00:44 PM	BCl3 MFC set to  0.000000
8/19/2011	5:00:44 PM	PHl3 MFC set to  0.000000
8/19/2011	5:00:44 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:00:44 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:00:45 PM	Tube furnace set to 150
8/19/2011	5:01:15 PM	H2 valve closed
8/19/2011	5:01:15 PM	BCl3 valve closed
8/19/2011	5:01:15 PM	PH3 valve closed
8/19/2011	5:01:15 PM	SiCl4 pre valve closed
8/19/2011	5:01:15 PM	SiCl4 post valve closed
8/19/2011	5:01:15 PM	Bypass valve closed
8/19/2011	5:01:15 PM	Bubbler valve closed
8/19/2011	5:01:15 PM	Helium valve opened
8/19/2011	5:01:15 PM	Main Vac valve opened
8/19/2011	5:01:15 PM	Helium MFC set to  20.000000
8/19/2011	5:01:15 PM	H2 MFC set to  0.000000
8/19/2011	5:01:15 PM	BCl3 MFC set to  0.000000
8/19/2011	5:01:15 PM	PHl3 MFC set to  0.000000
8/19/2011	5:01:15 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:01:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:01:15 PM	Tube furnace set to 150
8/19/2011	5:01:45 PM	Helium valve closed
8/19/2011	5:01:45 PM	H2 valve closed
8/19/2011	5:01:45 PM	BCl3 valve closed
8/19/2011	5:01:45 PM	PH3 valve closed
8/19/2011	5:01:45 PM	SiCl4 pre valve closed
8/19/2011	5:01:45 PM	SiCl4 post valve closed
8/19/2011	5:01:45 PM	Bypass valve closed
8/19/2011	5:01:45 PM	Bubbler valve closed
8/19/2011	5:01:45 PM	Main Vac valve opened
8/19/2011	5:01:45 PM	Helium MFC set to  0.000000
8/19/2011	5:01:45 PM	H2 MFC set to  0.000000
8/19/2011	5:01:45 PM	BCl3 MFC set to  0.000000
8/19/2011	5:01:45 PM	PHl3 MFC set to  0.000000
8/19/2011	5:01:45 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:01:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:01:45 PM	Tube furnace set to 150
8/19/2011	5:02:15 PM	H2 valve closed
8/19/2011	5:02:15 PM	BCl3 valve closed
8/19/2011	5:02:15 PM	PH3 valve closed
8/19/2011	5:02:15 PM	SiCl4 pre valve closed
8/19/2011	5:02:15 PM	SiCl4 post valve closed
8/19/2011	5:02:15 PM	Bypass valve closed
8/19/2011	5:02:15 PM	Bubbler valve closed
8/19/2011	5:02:15 PM	Helium valve opened
8/19/2011	5:02:15 PM	Main Vac valve opened
8/19/2011	5:02:15 PM	Helium MFC set to  20.000000
8/19/2011	5:02:15 PM	H2 MFC set to  0.000000
8/19/2011	5:02:15 PM	BCl3 MFC set to  0.000000
8/19/2011	5:02:15 PM	PHl3 MFC set to  0.000000
8/19/2011	5:02:15 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:02:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:02:15 PM	Tube furnace set to 150
8/19/2011	5:02:45 PM	Helium valve closed
8/19/2011	5:02:45 PM	H2 valve closed
8/19/2011	5:02:45 PM	BCl3 valve closed
8/19/2011	5:02:45 PM	PH3 valve closed
8/19/2011	5:02:45 PM	SiCl4 pre valve closed
8/19/2011	5:02:45 PM	SiCl4 post valve closed
8/19/2011	5:02:45 PM	Bypass valve closed
8/19/2011	5:02:45 PM	Bubbler valve closed
8/19/2011	5:02:45 PM	Main Vac valve opened
8/19/2011	5:02:45 PM	Helium MFC set to  0.000000
8/19/2011	5:02:45 PM	H2 MFC set to  0.000000
8/19/2011	5:02:45 PM	BCl3 MFC set to  0.000000
8/19/2011	5:02:45 PM	PHl3 MFC set to  0.000000
8/19/2011	5:02:45 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:02:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:02:45 PM	Tube furnace set to 150
8/19/2011	5:03:15 PM	H2 valve closed
8/19/2011	5:03:15 PM	BCl3 valve closed
8/19/2011	5:03:15 PM	PH3 valve closed
8/19/2011	5:03:15 PM	SiCl4 pre valve closed
8/19/2011	5:03:15 PM	SiCl4 post valve closed
8/19/2011	5:03:15 PM	Bypass valve closed
8/19/2011	5:03:15 PM	Bubbler valve closed
8/19/2011	5:03:15 PM	Helium valve opened
8/19/2011	5:03:15 PM	Main Vac valve opened
8/19/2011	5:03:15 PM	Helium MFC set to  20.000000
8/19/2011	5:03:15 PM	H2 MFC set to  0.000000
8/19/2011	5:03:15 PM	BCl3 MFC set to  0.000000
8/19/2011	5:03:15 PM	PHl3 MFC set to  0.000000
8/19/2011	5:03:15 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:03:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:03:16 PM	Tube furnace set to 150
8/19/2011	5:03:46 PM	Helium valve closed
8/19/2011	5:03:46 PM	H2 valve closed
8/19/2011	5:03:46 PM	BCl3 valve closed
8/19/2011	5:03:46 PM	PH3 valve closed
8/19/2011	5:03:46 PM	SiCl4 pre valve closed
8/19/2011	5:03:46 PM	SiCl4 post valve closed
8/19/2011	5:03:46 PM	Bypass valve closed
8/19/2011	5:03:46 PM	Bubbler valve closed
8/19/2011	5:03:46 PM	Main Vac valve opened
8/19/2011	5:03:46 PM	Helium MFC set to  0.000000
8/19/2011	5:03:46 PM	H2 MFC set to  0.000000
8/19/2011	5:03:46 PM	BCl3 MFC set to  0.000000
8/19/2011	5:03:46 PM	PHl3 MFC set to  0.000000
8/19/2011	5:03:46 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:03:46 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:03:46 PM	Tube furnace set to 150
8/19/2011	5:03:47 PM	Run finished at 5:03 PM
8/19/2011	5:04:57 PM	Recipe started at 5:04 PM
8/19/2011	5:04:57 PM	Helium valve closed
8/19/2011	5:04:57 PM	H2 valve closed
8/19/2011	5:04:57 PM	BCl3 valve closed
8/19/2011	5:04:57 PM	PH3 valve closed
8/19/2011	5:04:57 PM	SiCl4 pre valve closed
8/19/2011	5:04:57 PM	SiCl4 post valve closed
8/19/2011	5:04:57 PM	Bypass valve closed
8/19/2011	5:04:57 PM	Bubbler valve closed
8/19/2011	5:04:57 PM	Main Vac valve opened
8/19/2011	5:04:57 PM	Helium MFC set to  0.000000
8/19/2011	5:04:57 PM	H2 MFC set to  0.000000
8/19/2011	5:04:57 PM	BCl3 MFC set to  0.000000
8/19/2011	5:04:57 PM	PHl3 MFC set to  0.000000
8/19/2011	5:04:57 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:04:57 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:04:57 PM	Tube furnace set to 150
8/19/2011	5:05:27 PM	H2 valve closed
8/19/2011	5:05:27 PM	BCl3 valve closed
8/19/2011	5:05:27 PM	PH3 valve closed
8/19/2011	5:05:27 PM	SiCl4 pre valve closed
8/19/2011	5:05:27 PM	SiCl4 post valve closed
8/19/2011	5:05:27 PM	Bypass valve closed
8/19/2011	5:05:27 PM	Bubbler valve closed
8/19/2011	5:05:27 PM	Helium valve opened
8/19/2011	5:05:27 PM	Main Vac valve opened
8/19/2011	5:05:27 PM	Helium MFC set to  20.000000
8/19/2011	5:05:27 PM	H2 MFC set to  0.000000
8/19/2011	5:05:27 PM	BCl3 MFC set to  0.000000
8/19/2011	5:05:27 PM	PHl3 MFC set to  0.000000
8/19/2011	5:05:27 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:05:27 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:05:28 PM	Tube furnace set to 150
8/19/2011	5:05:58 PM	Helium valve closed
8/19/2011	5:05:58 PM	H2 valve closed
8/19/2011	5:05:58 PM	BCl3 valve closed
8/19/2011	5:05:58 PM	PH3 valve closed
8/19/2011	5:05:58 PM	SiCl4 pre valve closed
8/19/2011	5:05:58 PM	SiCl4 post valve closed
8/19/2011	5:05:58 PM	Bypass valve closed
8/19/2011	5:05:58 PM	Bubbler valve closed
8/19/2011	5:05:58 PM	Main Vac valve opened
8/19/2011	5:05:58 PM	Helium MFC set to  0.000000
8/19/2011	5:05:58 PM	H2 MFC set to  0.000000
8/19/2011	5:05:58 PM	BCl3 MFC set to  0.000000
8/19/2011	5:05:58 PM	PHl3 MFC set to  0.000000
8/19/2011	5:05:58 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:05:58 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:05:58 PM	Tube furnace set to 150
8/19/2011	5:06:28 PM	H2 valve closed
8/19/2011	5:06:28 PM	BCl3 valve closed
8/19/2011	5:06:28 PM	PH3 valve closed
8/19/2011	5:06:28 PM	SiCl4 pre valve closed
8/19/2011	5:06:28 PM	SiCl4 post valve closed
8/19/2011	5:06:28 PM	Bypass valve closed
8/19/2011	5:06:28 PM	Bubbler valve closed
8/19/2011	5:06:28 PM	Helium valve opened
8/19/2011	5:06:28 PM	Main Vac valve opened
8/19/2011	5:06:28 PM	Helium MFC set to  20.000000
8/19/2011	5:06:28 PM	H2 MFC set to  0.000000
8/19/2011	5:06:28 PM	BCl3 MFC set to  0.000000
8/19/2011	5:06:28 PM	PHl3 MFC set to  0.000000
8/19/2011	5:06:28 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:06:28 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:06:28 PM	Tube furnace set to 150
8/19/2011	5:06:58 PM	Helium valve closed
8/19/2011	5:06:58 PM	H2 valve closed
8/19/2011	5:06:58 PM	BCl3 valve closed
8/19/2011	5:06:58 PM	PH3 valve closed
8/19/2011	5:06:58 PM	SiCl4 pre valve closed
8/19/2011	5:06:58 PM	SiCl4 post valve closed
8/19/2011	5:06:58 PM	Bypass valve closed
8/19/2011	5:06:58 PM	Bubbler valve closed
8/19/2011	5:06:58 PM	Main Vac valve opened
8/19/2011	5:06:58 PM	Helium MFC set to  0.000000
8/19/2011	5:06:58 PM	H2 MFC set to  0.000000
8/19/2011	5:06:58 PM	BCl3 MFC set to  0.000000
8/19/2011	5:06:58 PM	PHl3 MFC set to  0.000000
8/19/2011	5:06:58 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:06:58 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:06:58 PM	Tube furnace set to 150
8/19/2011	5:07:28 PM	H2 valve closed
8/19/2011	5:07:28 PM	BCl3 valve closed
8/19/2011	5:07:28 PM	PH3 valve closed
8/19/2011	5:07:28 PM	SiCl4 pre valve closed
8/19/2011	5:07:28 PM	SiCl4 post valve closed
8/19/2011	5:07:28 PM	Bypass valve closed
8/19/2011	5:07:28 PM	Bubbler valve closed
8/19/2011	5:07:28 PM	Helium valve opened
8/19/2011	5:07:28 PM	Main Vac valve opened
8/19/2011	5:07:28 PM	Helium MFC set to  20.000000
8/19/2011	5:07:28 PM	H2 MFC set to  0.000000
8/19/2011	5:07:28 PM	BCl3 MFC set to  0.000000
8/19/2011	5:07:28 PM	PHl3 MFC set to  0.000000
8/19/2011	5:07:28 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:07:28 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:07:28 PM	Tube furnace set to 150
8/19/2011	5:07:58 PM	Helium valve closed
8/19/2011	5:07:58 PM	H2 valve closed
8/19/2011	5:07:58 PM	BCl3 valve closed
8/19/2011	5:07:58 PM	PH3 valve closed
8/19/2011	5:07:58 PM	SiCl4 pre valve closed
8/19/2011	5:07:58 PM	SiCl4 post valve closed
8/19/2011	5:07:58 PM	Bypass valve closed
8/19/2011	5:07:58 PM	Bubbler valve closed
8/19/2011	5:07:58 PM	Main Vac valve opened
8/19/2011	5:07:58 PM	Helium MFC set to  0.000000
8/19/2011	5:07:58 PM	H2 MFC set to  0.000000
8/19/2011	5:07:58 PM	BCl3 MFC set to  0.000000
8/19/2011	5:07:58 PM	PHl3 MFC set to  0.000000
8/19/2011	5:07:58 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:07:58 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:07:59 PM	Tube furnace set to 150
8/19/2011	5:08:29 PM	H2 valve closed
8/19/2011	5:08:29 PM	BCl3 valve closed
8/19/2011	5:08:29 PM	PH3 valve closed
8/19/2011	5:08:29 PM	SiCl4 pre valve closed
8/19/2011	5:08:29 PM	SiCl4 post valve closed
8/19/2011	5:08:29 PM	Bypass valve closed
8/19/2011	5:08:29 PM	Bubbler valve closed
8/19/2011	5:08:29 PM	Helium valve opened
8/19/2011	5:08:29 PM	Main Vac valve opened
8/19/2011	5:08:29 PM	Helium MFC set to  20.000000
8/19/2011	5:08:29 PM	H2 MFC set to  0.000000
8/19/2011	5:08:29 PM	BCl3 MFC set to  0.000000
8/19/2011	5:08:29 PM	PHl3 MFC set to  0.000000
8/19/2011	5:08:29 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:08:29 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:08:29 PM	Tube furnace set to 150
8/19/2011	5:08:59 PM	Helium valve closed
8/19/2011	5:08:59 PM	H2 valve closed
8/19/2011	5:08:59 PM	BCl3 valve closed
8/19/2011	5:08:59 PM	PH3 valve closed
8/19/2011	5:08:59 PM	SiCl4 pre valve closed
8/19/2011	5:08:59 PM	SiCl4 post valve closed
8/19/2011	5:08:59 PM	Bypass valve closed
8/19/2011	5:08:59 PM	Bubbler valve closed
8/19/2011	5:08:59 PM	Main Vac valve opened
8/19/2011	5:08:59 PM	Helium MFC set to  0.000000
8/19/2011	5:08:59 PM	H2 MFC set to  0.000000
8/19/2011	5:08:59 PM	BCl3 MFC set to  0.000000
8/19/2011	5:08:59 PM	PHl3 MFC set to  0.000000
8/19/2011	5:08:59 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:08:59 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:08:59 PM	Tube furnace set to 150
8/19/2011	5:09:29 PM	H2 valve closed
8/19/2011	5:09:29 PM	BCl3 valve closed
8/19/2011	5:09:29 PM	PH3 valve closed
8/19/2011	5:09:29 PM	SiCl4 pre valve closed
8/19/2011	5:09:29 PM	SiCl4 post valve closed
8/19/2011	5:09:29 PM	Bypass valve closed
8/19/2011	5:09:29 PM	Bubbler valve closed
8/19/2011	5:09:29 PM	Helium valve opened
8/19/2011	5:09:29 PM	Main Vac valve opened
8/19/2011	5:09:29 PM	Helium MFC set to  20.000000
8/19/2011	5:09:29 PM	H2 MFC set to  0.000000
8/19/2011	5:09:29 PM	BCl3 MFC set to  0.000000
8/19/2011	5:09:29 PM	PHl3 MFC set to  0.000000
8/19/2011	5:09:29 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:09:29 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:09:29 PM	Tube furnace set to 150
8/19/2011	5:09:59 PM	Helium valve closed
8/19/2011	5:09:59 PM	H2 valve closed
8/19/2011	5:09:59 PM	BCl3 valve closed
8/19/2011	5:09:59 PM	PH3 valve closed
8/19/2011	5:09:59 PM	SiCl4 pre valve closed
8/19/2011	5:09:59 PM	SiCl4 post valve closed
8/19/2011	5:09:59 PM	Bypass valve closed
8/19/2011	5:09:59 PM	Bubbler valve closed
8/19/2011	5:09:59 PM	Main Vac valve opened
8/19/2011	5:09:59 PM	Helium MFC set to  0.000000
8/19/2011	5:09:59 PM	H2 MFC set to  0.000000
8/19/2011	5:09:59 PM	BCl3 MFC set to  0.000000
8/19/2011	5:09:59 PM	PHl3 MFC set to  0.000000
8/19/2011	5:09:59 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:09:59 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:09:59 PM	Tube furnace set to 150
8/19/2011	5:10:29 PM	H2 valve closed
8/19/2011	5:10:29 PM	BCl3 valve closed
8/19/2011	5:10:29 PM	PH3 valve closed
8/19/2011	5:10:29 PM	SiCl4 pre valve closed
8/19/2011	5:10:29 PM	SiCl4 post valve closed
8/19/2011	5:10:29 PM	Bypass valve closed
8/19/2011	5:10:29 PM	Bubbler valve closed
8/19/2011	5:10:29 PM	Helium valve opened
8/19/2011	5:10:29 PM	Main Vac valve opened
8/19/2011	5:10:29 PM	Helium MFC set to  20.000000
8/19/2011	5:10:29 PM	H2 MFC set to  0.000000
8/19/2011	5:10:29 PM	BCl3 MFC set to  0.000000
8/19/2011	5:10:29 PM	PHl3 MFC set to  0.000000
8/19/2011	5:10:29 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:10:29 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:10:30 PM	Tube furnace set to 150
8/19/2011	5:11:00 PM	Helium valve closed
8/19/2011	5:11:00 PM	H2 valve closed
8/19/2011	5:11:00 PM	BCl3 valve closed
8/19/2011	5:11:00 PM	PH3 valve closed
8/19/2011	5:11:00 PM	SiCl4 pre valve closed
8/19/2011	5:11:00 PM	SiCl4 post valve closed
8/19/2011	5:11:00 PM	Bypass valve closed
8/19/2011	5:11:00 PM	Bubbler valve closed
8/19/2011	5:11:00 PM	Main Vac valve opened
8/19/2011	5:11:00 PM	Helium MFC set to  0.000000
8/19/2011	5:11:00 PM	H2 MFC set to  0.000000
8/19/2011	5:11:00 PM	BCl3 MFC set to  0.000000
8/19/2011	5:11:00 PM	PHl3 MFC set to  0.000000
8/19/2011	5:11:00 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:11:00 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:11:00 PM	Tube furnace set to 150
8/19/2011	5:11:30 PM	H2 valve closed
8/19/2011	5:11:30 PM	BCl3 valve closed
8/19/2011	5:11:30 PM	PH3 valve closed
8/19/2011	5:11:30 PM	SiCl4 pre valve closed
8/19/2011	5:11:30 PM	SiCl4 post valve closed
8/19/2011	5:11:30 PM	Bypass valve closed
8/19/2011	5:11:30 PM	Bubbler valve closed
8/19/2011	5:11:30 PM	Helium valve opened
8/19/2011	5:11:30 PM	Main Vac valve opened
8/19/2011	5:11:30 PM	Helium MFC set to  20.000000
8/19/2011	5:11:30 PM	H2 MFC set to  0.000000
8/19/2011	5:11:30 PM	BCl3 MFC set to  0.000000
8/19/2011	5:11:30 PM	PHl3 MFC set to  0.000000
8/19/2011	5:11:30 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:11:30 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:11:30 PM	Tube furnace set to 150
8/19/2011	5:12:00 PM	Helium valve closed
8/19/2011	5:12:00 PM	H2 valve closed
8/19/2011	5:12:00 PM	BCl3 valve closed
8/19/2011	5:12:00 PM	PH3 valve closed
8/19/2011	5:12:00 PM	SiCl4 pre valve closed
8/19/2011	5:12:00 PM	SiCl4 post valve closed
8/19/2011	5:12:00 PM	Bypass valve closed
8/19/2011	5:12:00 PM	Bubbler valve closed
8/19/2011	5:12:00 PM	Main Vac valve opened
8/19/2011	5:12:00 PM	Helium MFC set to  0.000000
8/19/2011	5:12:00 PM	H2 MFC set to  0.000000
8/19/2011	5:12:00 PM	BCl3 MFC set to  0.000000
8/19/2011	5:12:00 PM	PHl3 MFC set to  0.000000
8/19/2011	5:12:00 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:12:00 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:12:00 PM	Tube furnace set to 150
8/19/2011	5:12:30 PM	H2 valve closed
8/19/2011	5:12:30 PM	BCl3 valve closed
8/19/2011	5:12:30 PM	PH3 valve closed
8/19/2011	5:12:30 PM	SiCl4 pre valve closed
8/19/2011	5:12:30 PM	SiCl4 post valve closed
8/19/2011	5:12:30 PM	Bypass valve closed
8/19/2011	5:12:30 PM	Bubbler valve closed
8/19/2011	5:12:30 PM	Helium valve opened
8/19/2011	5:12:30 PM	Main Vac valve opened
8/19/2011	5:12:30 PM	Helium MFC set to  20.000000
8/19/2011	5:12:30 PM	H2 MFC set to  0.000000
8/19/2011	5:12:30 PM	BCl3 MFC set to  0.000000
8/19/2011	5:12:30 PM	PHl3 MFC set to  0.000000
8/19/2011	5:12:30 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:12:30 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:12:30 PM	Tube furnace set to 150
8/19/2011	5:13:00 PM	Helium valve closed
8/19/2011	5:13:00 PM	H2 valve closed
8/19/2011	5:13:00 PM	BCl3 valve closed
8/19/2011	5:13:00 PM	PH3 valve closed
8/19/2011	5:13:00 PM	SiCl4 pre valve closed
8/19/2011	5:13:00 PM	SiCl4 post valve closed
8/19/2011	5:13:00 PM	Bypass valve closed
8/19/2011	5:13:00 PM	Bubbler valve closed
8/19/2011	5:13:00 PM	Main Vac valve opened
8/19/2011	5:13:00 PM	Helium MFC set to  0.000000
8/19/2011	5:13:00 PM	H2 MFC set to  0.000000
8/19/2011	5:13:00 PM	BCl3 MFC set to  0.000000
8/19/2011	5:13:00 PM	PHl3 MFC set to  0.000000
8/19/2011	5:13:00 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:13:00 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:13:01 PM	Tube furnace set to 150
8/19/2011	5:13:31 PM	H2 valve closed
8/19/2011	5:13:31 PM	BCl3 valve closed
8/19/2011	5:13:31 PM	PH3 valve closed
8/19/2011	5:13:31 PM	SiCl4 pre valve closed
8/19/2011	5:13:31 PM	SiCl4 post valve closed
8/19/2011	5:13:31 PM	Bypass valve closed
8/19/2011	5:13:31 PM	Bubbler valve closed
8/19/2011	5:13:31 PM	Helium valve opened
8/19/2011	5:13:31 PM	Main Vac valve opened
8/19/2011	5:13:31 PM	Helium MFC set to  20.000000
8/19/2011	5:13:31 PM	H2 MFC set to  0.000000
8/19/2011	5:13:31 PM	BCl3 MFC set to  0.000000
8/19/2011	5:13:31 PM	PHl3 MFC set to  0.000000
8/19/2011	5:13:31 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:13:31 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:13:31 PM	Tube furnace set to 150
8/19/2011	5:14:01 PM	Helium valve closed
8/19/2011	5:14:01 PM	H2 valve closed
8/19/2011	5:14:01 PM	BCl3 valve closed
8/19/2011	5:14:01 PM	PH3 valve closed
8/19/2011	5:14:01 PM	SiCl4 pre valve closed
8/19/2011	5:14:01 PM	SiCl4 post valve closed
8/19/2011	5:14:01 PM	Bypass valve closed
8/19/2011	5:14:01 PM	Bubbler valve closed
8/19/2011	5:14:01 PM	Main Vac valve opened
8/19/2011	5:14:01 PM	Helium MFC set to  0.000000
8/19/2011	5:14:01 PM	H2 MFC set to  0.000000
8/19/2011	5:14:01 PM	BCl3 MFC set to  0.000000
8/19/2011	5:14:01 PM	PHl3 MFC set to  0.000000
8/19/2011	5:14:01 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:14:01 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:14:01 PM	Tube furnace set to 150
8/19/2011	5:14:31 PM	H2 valve closed
8/19/2011	5:14:31 PM	BCl3 valve closed
8/19/2011	5:14:31 PM	PH3 valve closed
8/19/2011	5:14:31 PM	SiCl4 pre valve closed
8/19/2011	5:14:31 PM	SiCl4 post valve closed
8/19/2011	5:14:31 PM	Bypass valve closed
8/19/2011	5:14:31 PM	Bubbler valve closed
8/19/2011	5:14:31 PM	Helium valve opened
8/19/2011	5:14:31 PM	Main Vac valve opened
8/19/2011	5:14:31 PM	Helium MFC set to  20.000000
8/19/2011	5:14:31 PM	H2 MFC set to  0.000000
8/19/2011	5:14:31 PM	BCl3 MFC set to  0.000000
8/19/2011	5:14:31 PM	PHl3 MFC set to  0.000000
8/19/2011	5:14:31 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:14:31 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:14:31 PM	Tube furnace set to 150
8/19/2011	5:15:01 PM	Helium valve closed
8/19/2011	5:15:01 PM	H2 valve closed
8/19/2011	5:15:01 PM	BCl3 valve closed
8/19/2011	5:15:01 PM	PH3 valve closed
8/19/2011	5:15:01 PM	SiCl4 pre valve closed
8/19/2011	5:15:01 PM	SiCl4 post valve closed
8/19/2011	5:15:01 PM	Bypass valve closed
8/19/2011	5:15:01 PM	Bubbler valve closed
8/19/2011	5:15:01 PM	Main Vac valve opened
8/19/2011	5:15:01 PM	Helium MFC set to  0.000000
8/19/2011	5:15:01 PM	H2 MFC set to  0.000000
8/19/2011	5:15:01 PM	BCl3 MFC set to  0.000000
8/19/2011	5:15:01 PM	PHl3 MFC set to  0.000000
8/19/2011	5:15:01 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:15:01 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:15:01 PM	Tube furnace set to 150
8/19/2011	5:15:02 PM	Run finished at 5:15 PM
8/19/2011	5:15:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/19/2011	5:15:34 PM	Recipe started at 5:15 PM
8/19/2011	5:15:34 PM	Helium valve closed
8/19/2011	5:15:34 PM	H2 valve closed
8/19/2011	5:15:34 PM	BCl3 valve closed
8/19/2011	5:15:34 PM	PH3 valve closed
8/19/2011	5:15:34 PM	SiCl4 pre valve closed
8/19/2011	5:15:34 PM	SiCl4 post valve closed
8/19/2011	5:15:34 PM	Main Vac valve closed
8/19/2011	5:15:34 PM	Bypass valve closed
8/19/2011	5:15:34 PM	Bubbler valve closed
8/19/2011	5:15:34 PM	Helium MFC set to  0.000000
8/19/2011	5:15:34 PM	H2 MFC set to  0.000000
8/19/2011	5:15:34 PM	BCl3 MFC set to  0.000000
8/19/2011	5:15:34 PM	PHl3 MFC set to  0.000000
8/19/2011	5:15:34 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:15:34 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:15:34 PM	Tube furnace set to 0
8/19/2011	5:15:35 PM	Run finished at 5:15 PM
8/19/2011	5:15:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/19/2011	5:15:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2011	5:15:41 PM	Recipe started at 5:15 PM
8/19/2011	5:15:41 PM	Helium valve closed
8/19/2011	5:15:41 PM	H2 valve closed
8/19/2011	5:15:41 PM	BCl3 valve closed
8/19/2011	5:15:41 PM	PH3 valve closed
8/19/2011	5:15:41 PM	SiCl4 pre valve closed
8/19/2011	5:15:41 PM	SiCl4 post valve closed
8/19/2011	5:15:41 PM	Main Vac valve closed
8/19/2011	5:15:41 PM	Bubbler valve closed
8/19/2011	5:15:41 PM	Bypass valve opened
8/19/2011	5:15:41 PM	Helium MFC set to  0.000000
8/19/2011	5:15:41 PM	H2 MFC set to  0.000000
8/19/2011	5:15:41 PM	BCl3 MFC set to  0.000000
8/19/2011	5:15:41 PM	PHl3 MFC set to  0.000000
8/19/2011	5:15:41 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:15:41 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:15:41 PM	Tube furnace set to 0
8/19/2011	5:15:41 PM	Helium valve closed
8/19/2011	5:15:41 PM	H2 valve closed
8/19/2011	5:15:41 PM	BCl3 valve closed
8/19/2011	5:15:41 PM	PH3 valve closed
8/19/2011	5:15:41 PM	SiCl4 pre valve closed
8/19/2011	5:15:41 PM	SiCl4 post valve closed
8/19/2011	5:15:41 PM	Main Vac valve closed
8/19/2011	5:15:41 PM	Bubbler valve closed
8/19/2011	5:15:41 PM	Bypass valve opened
8/19/2011	5:15:41 PM	Helium MFC set to  0.000000
8/19/2011	5:15:41 PM	H2 MFC set to  0.000000
8/19/2011	5:15:41 PM	BCl3 MFC set to  0.000000
8/19/2011	5:15:41 PM	PHl3 MFC set to  0.000000
8/19/2011	5:15:41 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:15:41 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:15:42 PM	Tube furnace set to 0
8/19/2011	5:16:16 PM	Helium valve closed
8/19/2011	5:16:16 PM	H2 valve closed
8/19/2011	5:16:16 PM	BCl3 valve closed
8/19/2011	5:16:16 PM	PH3 valve closed
8/19/2011	5:16:16 PM	SiCl4 pre valve closed
8/19/2011	5:16:16 PM	SiCl4 post valve closed
8/19/2011	5:16:16 PM	Bypass valve closed
8/19/2011	5:16:16 PM	Bubbler valve closed
8/19/2011	5:16:16 PM	Main Vac valve opened
8/19/2011	5:16:16 PM	Helium MFC set to  0.000000
8/19/2011	5:16:16 PM	H2 MFC set to  0.000000
8/19/2011	5:16:16 PM	BCl3 MFC set to  0.000000
8/19/2011	5:16:16 PM	PHl3 MFC set to  0.000000
8/19/2011	5:16:16 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:16:16 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:16:16 PM	Tube furnace set to 0
8/19/2011	5:16:17 PM	Run finished at 5:16 PM
8/19/2011	5:16:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2011	5:16:41 PM	Recipe started at 5:16 PM
8/19/2011	5:16:41 PM	Helium valve closed
8/19/2011	5:16:41 PM	H2 valve closed
8/19/2011	5:16:41 PM	BCl3 valve closed
8/19/2011	5:16:41 PM	PH3 valve closed
8/19/2011	5:16:41 PM	SiCl4 pre valve closed
8/19/2011	5:16:41 PM	SiCl4 post valve closed
8/19/2011	5:16:41 PM	Bypass valve closed
8/19/2011	5:16:41 PM	Bubbler valve closed
8/19/2011	5:16:41 PM	Main Vac valve opened
8/19/2011	5:16:41 PM	Helium MFC set to  0.000000
8/19/2011	5:16:41 PM	H2 MFC set to  0.000000
8/19/2011	5:16:41 PM	BCl3 MFC set to  0.000000
8/19/2011	5:16:41 PM	PHl3 MFC set to  0.000000
8/19/2011	5:16:41 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:16:41 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:16:41 PM	Tube furnace set to 150
8/19/2011	5:17:11 PM	H2 valve closed
8/19/2011	5:17:11 PM	BCl3 valve closed
8/19/2011	5:17:11 PM	PH3 valve closed
8/19/2011	5:17:11 PM	SiCl4 pre valve closed
8/19/2011	5:17:11 PM	SiCl4 post valve closed
8/19/2011	5:17:11 PM	Bypass valve closed
8/19/2011	5:17:11 PM	Bubbler valve closed
8/19/2011	5:17:11 PM	Helium valve opened
8/19/2011	5:17:11 PM	Main Vac valve opened
8/19/2011	5:17:11 PM	Helium MFC set to  20.000000
8/19/2011	5:17:11 PM	H2 MFC set to  0.000000
8/19/2011	5:17:11 PM	BCl3 MFC set to  0.000000
8/19/2011	5:17:11 PM	PHl3 MFC set to  0.000000
8/19/2011	5:17:11 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:17:11 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:17:11 PM	Tube furnace set to 150
8/19/2011	5:17:41 PM	Helium valve closed
8/19/2011	5:17:41 PM	H2 valve closed
8/19/2011	5:17:41 PM	BCl3 valve closed
8/19/2011	5:17:41 PM	PH3 valve closed
8/19/2011	5:17:41 PM	SiCl4 pre valve closed
8/19/2011	5:17:41 PM	SiCl4 post valve closed
8/19/2011	5:17:41 PM	Bypass valve closed
8/19/2011	5:17:41 PM	Bubbler valve closed
8/19/2011	5:17:41 PM	Main Vac valve opened
8/19/2011	5:17:41 PM	Helium MFC set to  0.000000
8/19/2011	5:17:41 PM	H2 MFC set to  0.000000
8/19/2011	5:17:41 PM	BCl3 MFC set to  0.000000
8/19/2011	5:17:41 PM	PHl3 MFC set to  0.000000
8/19/2011	5:17:41 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:17:41 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:17:41 PM	Tube furnace set to 150
8/19/2011	5:18:12 PM	H2 valve closed
8/19/2011	5:18:12 PM	BCl3 valve closed
8/19/2011	5:18:12 PM	PH3 valve closed
8/19/2011	5:18:12 PM	SiCl4 pre valve closed
8/19/2011	5:18:12 PM	SiCl4 post valve closed
8/19/2011	5:18:12 PM	Bypass valve closed
8/19/2011	5:18:12 PM	Bubbler valve closed
8/19/2011	5:18:12 PM	Helium valve opened
8/19/2011	5:18:12 PM	Main Vac valve opened
8/19/2011	5:18:12 PM	Helium MFC set to  20.000000
8/19/2011	5:18:12 PM	H2 MFC set to  0.000000
8/19/2011	5:18:12 PM	BCl3 MFC set to  0.000000
8/19/2011	5:18:12 PM	PHl3 MFC set to  0.000000
8/19/2011	5:18:12 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:18:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:18:12 PM	Tube furnace set to 150
8/19/2011	5:18:42 PM	Helium valve closed
8/19/2011	5:18:42 PM	H2 valve closed
8/19/2011	5:18:42 PM	BCl3 valve closed
8/19/2011	5:18:42 PM	PH3 valve closed
8/19/2011	5:18:42 PM	SiCl4 pre valve closed
8/19/2011	5:18:42 PM	SiCl4 post valve closed
8/19/2011	5:18:42 PM	Bypass valve closed
8/19/2011	5:18:42 PM	Bubbler valve closed
8/19/2011	5:18:42 PM	Main Vac valve opened
8/19/2011	5:18:42 PM	Helium MFC set to  0.000000
8/19/2011	5:18:42 PM	H2 MFC set to  0.000000
8/19/2011	5:18:42 PM	BCl3 MFC set to  0.000000
8/19/2011	5:18:42 PM	PHl3 MFC set to  0.000000
8/19/2011	5:18:42 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:18:42 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:18:42 PM	Tube furnace set to 150
8/19/2011	5:19:12 PM	H2 valve closed
8/19/2011	5:19:12 PM	BCl3 valve closed
8/19/2011	5:19:12 PM	PH3 valve closed
8/19/2011	5:19:12 PM	SiCl4 pre valve closed
8/19/2011	5:19:12 PM	SiCl4 post valve closed
8/19/2011	5:19:12 PM	Bypass valve closed
8/19/2011	5:19:12 PM	Bubbler valve closed
8/19/2011	5:19:12 PM	Helium valve opened
8/19/2011	5:19:12 PM	Main Vac valve opened
8/19/2011	5:19:12 PM	Helium MFC set to  20.000000
8/19/2011	5:19:12 PM	H2 MFC set to  0.000000
8/19/2011	5:19:12 PM	BCl3 MFC set to  0.000000
8/19/2011	5:19:12 PM	PHl3 MFC set to  0.000000
8/19/2011	5:19:12 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:19:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:19:12 PM	Tube furnace set to 150
8/19/2011	5:19:42 PM	Helium valve closed
8/19/2011	5:19:42 PM	H2 valve closed
8/19/2011	5:19:42 PM	BCl3 valve closed
8/19/2011	5:19:42 PM	PH3 valve closed
8/19/2011	5:19:42 PM	SiCl4 pre valve closed
8/19/2011	5:19:42 PM	SiCl4 post valve closed
8/19/2011	5:19:42 PM	Bypass valve closed
8/19/2011	5:19:42 PM	Bubbler valve closed
8/19/2011	5:19:42 PM	Main Vac valve opened
8/19/2011	5:19:42 PM	Helium MFC set to  0.000000
8/19/2011	5:19:42 PM	H2 MFC set to  0.000000
8/19/2011	5:19:42 PM	BCl3 MFC set to  0.000000
8/19/2011	5:19:42 PM	PHl3 MFC set to  0.000000
8/19/2011	5:19:42 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:19:42 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:19:42 PM	Tube furnace set to 150
8/19/2011	5:20:12 PM	H2 valve closed
8/19/2011	5:20:12 PM	BCl3 valve closed
8/19/2011	5:20:12 PM	PH3 valve closed
8/19/2011	5:20:12 PM	SiCl4 pre valve closed
8/19/2011	5:20:12 PM	SiCl4 post valve closed
8/19/2011	5:20:12 PM	Bypass valve closed
8/19/2011	5:20:12 PM	Bubbler valve closed
8/19/2011	5:20:12 PM	Helium valve opened
8/19/2011	5:20:12 PM	Main Vac valve opened
8/19/2011	5:20:12 PM	Helium MFC set to  20.000000
8/19/2011	5:20:12 PM	H2 MFC set to  0.000000
8/19/2011	5:20:12 PM	BCl3 MFC set to  0.000000
8/19/2011	5:20:12 PM	PHl3 MFC set to  0.000000
8/19/2011	5:20:12 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:20:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:20:13 PM	Tube furnace set to 150
8/19/2011	5:20:43 PM	Helium valve closed
8/19/2011	5:20:43 PM	H2 valve closed
8/19/2011	5:20:43 PM	BCl3 valve closed
8/19/2011	5:20:43 PM	PH3 valve closed
8/19/2011	5:20:43 PM	SiCl4 pre valve closed
8/19/2011	5:20:43 PM	SiCl4 post valve closed
8/19/2011	5:20:43 PM	Bypass valve closed
8/19/2011	5:20:43 PM	Bubbler valve closed
8/19/2011	5:20:43 PM	Main Vac valve opened
8/19/2011	5:20:43 PM	Helium MFC set to  0.000000
8/19/2011	5:20:43 PM	H2 MFC set to  0.000000
8/19/2011	5:20:43 PM	BCl3 MFC set to  0.000000
8/19/2011	5:20:43 PM	PHl3 MFC set to  0.000000
8/19/2011	5:20:43 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:20:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:20:43 PM	Tube furnace set to 150
8/19/2011	5:21:13 PM	H2 valve closed
8/19/2011	5:21:13 PM	BCl3 valve closed
8/19/2011	5:21:13 PM	PH3 valve closed
8/19/2011	5:21:13 PM	SiCl4 pre valve closed
8/19/2011	5:21:13 PM	SiCl4 post valve closed
8/19/2011	5:21:13 PM	Bypass valve closed
8/19/2011	5:21:13 PM	Bubbler valve closed
8/19/2011	5:21:13 PM	Helium valve opened
8/19/2011	5:21:13 PM	Main Vac valve opened
8/19/2011	5:21:13 PM	Helium MFC set to  20.000000
8/19/2011	5:21:13 PM	H2 MFC set to  0.000000
8/19/2011	5:21:13 PM	BCl3 MFC set to  0.000000
8/19/2011	5:21:13 PM	PHl3 MFC set to  0.000000
8/19/2011	5:21:13 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:21:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:21:13 PM	Tube furnace set to 150
8/19/2011	5:21:43 PM	Helium valve closed
8/19/2011	5:21:43 PM	H2 valve closed
8/19/2011	5:21:43 PM	BCl3 valve closed
8/19/2011	5:21:43 PM	PH3 valve closed
8/19/2011	5:21:43 PM	SiCl4 pre valve closed
8/19/2011	5:21:43 PM	SiCl4 post valve closed
8/19/2011	5:21:43 PM	Bypass valve closed
8/19/2011	5:21:43 PM	Bubbler valve closed
8/19/2011	5:21:43 PM	Main Vac valve opened
8/19/2011	5:21:43 PM	Helium MFC set to  0.000000
8/19/2011	5:21:43 PM	H2 MFC set to  0.000000
8/19/2011	5:21:43 PM	BCl3 MFC set to  0.000000
8/19/2011	5:21:43 PM	PHl3 MFC set to  0.000000
8/19/2011	5:21:43 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:21:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:21:43 PM	Tube furnace set to 150
8/19/2011	5:22:13 PM	H2 valve closed
8/19/2011	5:22:13 PM	BCl3 valve closed
8/19/2011	5:22:13 PM	PH3 valve closed
8/19/2011	5:22:13 PM	SiCl4 pre valve closed
8/19/2011	5:22:13 PM	SiCl4 post valve closed
8/19/2011	5:22:13 PM	Bypass valve closed
8/19/2011	5:22:13 PM	Bubbler valve closed
8/19/2011	5:22:13 PM	Helium valve opened
8/19/2011	5:22:13 PM	Main Vac valve opened
8/19/2011	5:22:13 PM	Helium MFC set to  20.000000
8/19/2011	5:22:13 PM	H2 MFC set to  0.000000
8/19/2011	5:22:13 PM	BCl3 MFC set to  0.000000
8/19/2011	5:22:13 PM	PHl3 MFC set to  0.000000
8/19/2011	5:22:13 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:22:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:22:13 PM	Tube furnace set to 150
8/19/2011	5:22:43 PM	Helium valve closed
8/19/2011	5:22:43 PM	H2 valve closed
8/19/2011	5:22:43 PM	BCl3 valve closed
8/19/2011	5:22:43 PM	PH3 valve closed
8/19/2011	5:22:43 PM	SiCl4 pre valve closed
8/19/2011	5:22:43 PM	SiCl4 post valve closed
8/19/2011	5:22:43 PM	Bypass valve closed
8/19/2011	5:22:43 PM	Bubbler valve closed
8/19/2011	5:22:43 PM	Main Vac valve opened
8/19/2011	5:22:43 PM	Helium MFC set to  0.000000
8/19/2011	5:22:43 PM	H2 MFC set to  0.000000
8/19/2011	5:22:43 PM	BCl3 MFC set to  0.000000
8/19/2011	5:22:43 PM	PHl3 MFC set to  0.000000
8/19/2011	5:22:43 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:22:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:22:44 PM	Tube furnace set to 150
8/19/2011	5:23:14 PM	H2 valve closed
8/19/2011	5:23:14 PM	BCl3 valve closed
8/19/2011	5:23:14 PM	PH3 valve closed
8/19/2011	5:23:14 PM	SiCl4 pre valve closed
8/19/2011	5:23:14 PM	SiCl4 post valve closed
8/19/2011	5:23:14 PM	Bypass valve closed
8/19/2011	5:23:14 PM	Bubbler valve closed
8/19/2011	5:23:14 PM	Helium valve opened
8/19/2011	5:23:14 PM	Main Vac valve opened
8/19/2011	5:23:14 PM	Helium MFC set to  20.000000
8/19/2011	5:23:14 PM	H2 MFC set to  0.000000
8/19/2011	5:23:14 PM	BCl3 MFC set to  0.000000
8/19/2011	5:23:14 PM	PHl3 MFC set to  0.000000
8/19/2011	5:23:14 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:23:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:23:14 PM	Tube furnace set to 150
8/19/2011	5:23:44 PM	Helium valve closed
8/19/2011	5:23:44 PM	H2 valve closed
8/19/2011	5:23:44 PM	BCl3 valve closed
8/19/2011	5:23:44 PM	PH3 valve closed
8/19/2011	5:23:44 PM	SiCl4 pre valve closed
8/19/2011	5:23:44 PM	SiCl4 post valve closed
8/19/2011	5:23:44 PM	Bypass valve closed
8/19/2011	5:23:44 PM	Bubbler valve closed
8/19/2011	5:23:44 PM	Main Vac valve opened
8/19/2011	5:23:44 PM	Helium MFC set to  0.000000
8/19/2011	5:23:44 PM	H2 MFC set to  0.000000
8/19/2011	5:23:44 PM	BCl3 MFC set to  0.000000
8/19/2011	5:23:44 PM	PHl3 MFC set to  0.000000
8/19/2011	5:23:44 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:23:44 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:23:44 PM	Tube furnace set to 150
8/19/2011	5:24:14 PM	H2 valve closed
8/19/2011	5:24:14 PM	BCl3 valve closed
8/19/2011	5:24:14 PM	PH3 valve closed
8/19/2011	5:24:14 PM	SiCl4 pre valve closed
8/19/2011	5:24:14 PM	SiCl4 post valve closed
8/19/2011	5:24:14 PM	Bypass valve closed
8/19/2011	5:24:14 PM	Bubbler valve closed
8/19/2011	5:24:14 PM	Helium valve opened
8/19/2011	5:24:14 PM	Main Vac valve opened
8/19/2011	5:24:14 PM	Helium MFC set to  20.000000
8/19/2011	5:24:14 PM	H2 MFC set to  0.000000
8/19/2011	5:24:14 PM	BCl3 MFC set to  0.000000
8/19/2011	5:24:14 PM	PHl3 MFC set to  0.000000
8/19/2011	5:24:14 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:24:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:24:14 PM	Tube furnace set to 150
8/19/2011	5:24:44 PM	Helium valve closed
8/19/2011	5:24:44 PM	H2 valve closed
8/19/2011	5:24:44 PM	BCl3 valve closed
8/19/2011	5:24:44 PM	PH3 valve closed
8/19/2011	5:24:44 PM	SiCl4 pre valve closed
8/19/2011	5:24:44 PM	SiCl4 post valve closed
8/19/2011	5:24:44 PM	Bypass valve closed
8/19/2011	5:24:44 PM	Bubbler valve closed
8/19/2011	5:24:44 PM	Main Vac valve opened
8/19/2011	5:24:44 PM	Helium MFC set to  0.000000
8/19/2011	5:24:44 PM	H2 MFC set to  0.000000
8/19/2011	5:24:44 PM	BCl3 MFC set to  0.000000
8/19/2011	5:24:44 PM	PHl3 MFC set to  0.000000
8/19/2011	5:24:44 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:24:44 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:24:45 PM	Tube furnace set to 150
8/19/2011	5:25:15 PM	H2 valve closed
8/19/2011	5:25:15 PM	BCl3 valve closed
8/19/2011	5:25:15 PM	PH3 valve closed
8/19/2011	5:25:15 PM	SiCl4 pre valve closed
8/19/2011	5:25:15 PM	SiCl4 post valve closed
8/19/2011	5:25:15 PM	Bypass valve closed
8/19/2011	5:25:15 PM	Bubbler valve closed
8/19/2011	5:25:15 PM	Helium valve opened
8/19/2011	5:25:15 PM	Main Vac valve opened
8/19/2011	5:25:15 PM	Helium MFC set to  20.000000
8/19/2011	5:25:15 PM	H2 MFC set to  0.000000
8/19/2011	5:25:15 PM	BCl3 MFC set to  0.000000
8/19/2011	5:25:15 PM	PHl3 MFC set to  0.000000
8/19/2011	5:25:15 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:25:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:25:15 PM	Tube furnace set to 150
8/19/2011	5:25:45 PM	Helium valve closed
8/19/2011	5:25:45 PM	H2 valve closed
8/19/2011	5:25:45 PM	BCl3 valve closed
8/19/2011	5:25:45 PM	PH3 valve closed
8/19/2011	5:25:45 PM	SiCl4 pre valve closed
8/19/2011	5:25:45 PM	SiCl4 post valve closed
8/19/2011	5:25:45 PM	Bypass valve closed
8/19/2011	5:25:45 PM	Bubbler valve closed
8/19/2011	5:25:45 PM	Main Vac valve opened
8/19/2011	5:25:45 PM	Helium MFC set to  0.000000
8/19/2011	5:25:45 PM	H2 MFC set to  0.000000
8/19/2011	5:25:45 PM	BCl3 MFC set to  0.000000
8/19/2011	5:25:45 PM	PHl3 MFC set to  0.000000
8/19/2011	5:25:45 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:25:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:25:45 PM	Tube furnace set to 150
8/19/2011	5:26:15 PM	H2 valve closed
8/19/2011	5:26:15 PM	BCl3 valve closed
8/19/2011	5:26:15 PM	PH3 valve closed
8/19/2011	5:26:15 PM	SiCl4 pre valve closed
8/19/2011	5:26:15 PM	SiCl4 post valve closed
8/19/2011	5:26:15 PM	Bypass valve closed
8/19/2011	5:26:15 PM	Bubbler valve closed
8/19/2011	5:26:15 PM	Helium valve opened
8/19/2011	5:26:15 PM	Main Vac valve opened
8/19/2011	5:26:15 PM	Helium MFC set to  20.000000
8/19/2011	5:26:15 PM	H2 MFC set to  0.000000
8/19/2011	5:26:15 PM	BCl3 MFC set to  0.000000
8/19/2011	5:26:15 PM	PHl3 MFC set to  0.000000
8/19/2011	5:26:15 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:26:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:26:15 PM	Tube furnace set to 150
8/19/2011	5:26:45 PM	Helium valve closed
8/19/2011	5:26:45 PM	H2 valve closed
8/19/2011	5:26:45 PM	BCl3 valve closed
8/19/2011	5:26:45 PM	PH3 valve closed
8/19/2011	5:26:45 PM	SiCl4 pre valve closed
8/19/2011	5:26:45 PM	SiCl4 post valve closed
8/19/2011	5:26:45 PM	Bypass valve closed
8/19/2011	5:26:45 PM	Bubbler valve closed
8/19/2011	5:26:45 PM	Main Vac valve opened
8/19/2011	5:26:45 PM	Helium MFC set to  0.000000
8/19/2011	5:26:45 PM	H2 MFC set to  0.000000
8/19/2011	5:26:45 PM	BCl3 MFC set to  0.000000
8/19/2011	5:26:45 PM	PHl3 MFC set to  0.000000
8/19/2011	5:26:45 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:26:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:26:45 PM	Tube furnace set to 150
8/19/2011	5:26:46 PM	Run finished at 5:26 PM
8/19/2011	5:27:47 PM	Recipe started at 5:27 PM
8/19/2011	5:27:47 PM	Helium valve closed
8/19/2011	5:27:47 PM	H2 valve closed
8/19/2011	5:27:47 PM	BCl3 valve closed
8/19/2011	5:27:47 PM	PH3 valve closed
8/19/2011	5:27:47 PM	SiCl4 pre valve closed
8/19/2011	5:27:47 PM	SiCl4 post valve closed
8/19/2011	5:27:47 PM	Main Vac valve closed
8/19/2011	5:27:47 PM	Bypass valve closed
8/19/2011	5:27:47 PM	Bubbler valve closed
8/19/2011	5:27:47 PM	Helium MFC set to  0.000000
8/19/2011	5:27:47 PM	H2 MFC set to  0.000000
8/19/2011	5:27:47 PM	BCl3 MFC set to  0.000000
8/19/2011	5:27:47 PM	PHl3 MFC set to  0.000000
8/19/2011	5:27:47 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:27:47 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:27:48 PM	Tube furnace set to 0
8/19/2011	5:27:51 PM	Helium valve closed
8/19/2011	5:27:51 PM	BCl3 valve closed
8/19/2011	5:27:51 PM	PH3 valve closed
8/19/2011	5:27:51 PM	SiCl4 pre valve closed
8/19/2011	5:27:51 PM	SiCl4 post valve closed
8/19/2011	5:27:51 PM	Main Vac valve closed
8/19/2011	5:27:51 PM	Bypass valve closed
8/19/2011	5:27:51 PM	Bubbler valve closed
8/19/2011	5:27:51 PM	H2 valve opened
8/19/2011	5:27:51 PM	Helium MFC set to  0.000000
8/19/2011	5:27:51 PM	H2 MFC set to  500.000000
8/19/2011	5:27:51 PM	BCl3 MFC set to  0.000000
8/19/2011	5:27:51 PM	PHl3 MFC set to  0.000000
8/19/2011	5:27:51 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:27:51 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:27:51 PM	Tube furnace set to 0
8/19/2011	5:28:54 PM	Helium valve closed
8/19/2011	5:28:54 PM	BCl3 valve closed
8/19/2011	5:28:54 PM	PH3 valve closed
8/19/2011	5:28:54 PM	SiCl4 pre valve closed
8/19/2011	5:28:54 PM	SiCl4 post valve closed
8/19/2011	5:28:54 PM	Main Vac valve closed
8/19/2011	5:28:54 PM	Bypass valve closed
8/19/2011	5:28:54 PM	H2 valve opened
8/19/2011	5:28:54 PM	Bubbler valve opened
8/19/2011	5:28:54 PM	Helium MFC set to  0.000000
8/19/2011	5:28:54 PM	H2 MFC set to  500.000000
8/19/2011	5:28:54 PM	BCl3 MFC set to  0.000000
8/19/2011	5:28:54 PM	PHl3 MFC set to  0.000000
8/19/2011	5:28:54 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:28:54 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:28:55 PM	Tube furnace set to 0
8/19/2011	5:28:56 PM	Helium valve closed
8/19/2011	5:28:56 PM	BCl3 valve closed
8/19/2011	5:28:56 PM	PH3 valve closed
8/19/2011	5:28:56 PM	SiCl4 pre valve closed
8/19/2011	5:28:56 PM	SiCl4 post valve closed
8/19/2011	5:28:56 PM	Main Vac valve closed
8/19/2011	5:28:56 PM	Bypass valve closed
8/19/2011	5:28:56 PM	H2 valve opened
8/19/2011	5:28:56 PM	Bubbler valve opened
8/19/2011	5:28:56 PM	Helium MFC set to  0.000000
8/19/2011	5:28:56 PM	H2 MFC set to  500.000000
8/19/2011	5:28:56 PM	BCl3 MFC set to  0.000000
8/19/2011	5:28:56 PM	PHl3 MFC set to  0.000000
8/19/2011	5:28:56 PM	SiCl4 MFC set to  0.000000
8/19/2011	5:28:56 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:28:56 PM	Tube furnace set to 1000
8/19/2011	5:48:56 PM	Helium valve closed
8/19/2011	5:48:56 PM	PH3 valve closed
8/19/2011	5:48:56 PM	Main Vac valve closed
8/19/2011	5:48:56 PM	Bypass valve closed
8/19/2011	5:48:56 PM	H2 valve opened
8/19/2011	5:48:56 PM	BCl3 valve opened
8/19/2011	5:48:56 PM	SiCl4 pre valve opened
8/19/2011	5:48:56 PM	SiCl4 post valve opened
8/19/2011	5:48:56 PM	Bubbler valve opened
8/19/2011	5:48:56 PM	Helium MFC set to  0.000000
8/19/2011	5:48:56 PM	H2 MFC set to  500.000000
8/19/2011	5:48:56 PM	BCl3 MFC set to  2.300000
8/19/2011	5:48:56 PM	PHl3 MFC set to  0.000000
8/19/2011	5:48:56 PM	SiCl4 MFC set to  50.000000
8/19/2011	5:48:56 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	5:48:56 PM	Tube furnace set to 1000
8/19/2011	6:05:36 PM	Helium valve closed
8/19/2011	6:05:36 PM	BCl3 valve closed
8/19/2011	6:05:36 PM	PH3 valve closed
8/19/2011	6:05:36 PM	SiCl4 pre valve closed
8/19/2011	6:05:36 PM	SiCl4 post valve closed
8/19/2011	6:05:36 PM	Main Vac valve closed
8/19/2011	6:05:36 PM	Bypass valve closed
8/19/2011	6:05:36 PM	H2 valve opened
8/19/2011	6:05:36 PM	Bubbler valve opened
8/19/2011	6:05:36 PM	Helium MFC set to  0.000000
8/19/2011	6:05:36 PM	H2 MFC set to  500.000000
8/19/2011	6:05:36 PM	BCl3 MFC set to  0.000000
8/19/2011	6:05:36 PM	PHl3 MFC set to  0.000000
8/19/2011	6:05:36 PM	SiCl4 MFC set to  0.000000
8/19/2011	6:05:36 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	6:05:36 PM	Tube furnace set to 750
8/19/2011	6:10:36 PM	H2 valve closed
8/19/2011	6:10:36 PM	BCl3 valve closed
8/19/2011	6:10:36 PM	PH3 valve closed
8/19/2011	6:10:36 PM	SiCl4 pre valve closed
8/19/2011	6:10:36 PM	SiCl4 post valve closed
8/19/2011	6:10:36 PM	Main Vac valve closed
8/19/2011	6:10:36 PM	Bypass valve closed
8/19/2011	6:10:36 PM	Helium valve opened
8/19/2011	6:10:36 PM	Bubbler valve opened
8/19/2011	6:10:36 PM	Helium MFC set to  500.000000
8/19/2011	6:10:36 PM	H2 MFC set to  0.000000
8/19/2011	6:10:36 PM	BCl3 MFC set to  0.000000
8/19/2011	6:10:36 PM	PHl3 MFC set to  0.000000
8/19/2011	6:10:36 PM	SiCl4 MFC set to  0.000000
8/19/2011	6:10:36 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	6:10:36 PM	Tube furnace set to 0
8/19/2011	6:30:36 PM	Helium valve closed
8/19/2011	6:30:36 PM	H2 valve closed
8/19/2011	6:30:36 PM	BCl3 valve closed
8/19/2011	6:30:36 PM	PH3 valve closed
8/19/2011	6:30:36 PM	SiCl4 pre valve closed
8/19/2011	6:30:36 PM	SiCl4 post valve closed
8/19/2011	6:30:36 PM	Main Vac valve closed
8/19/2011	6:30:36 PM	Bypass valve closed
8/19/2011	6:30:36 PM	Bubbler valve closed
8/19/2011	6:30:36 PM	Helium MFC set to  0.000000
8/19/2011	6:30:36 PM	H2 MFC set to  0.000000
8/19/2011	6:30:36 PM	BCl3 MFC set to  0.000000
8/19/2011	6:30:36 PM	PHl3 MFC set to  0.000000
8/19/2011	6:30:36 PM	SiCl4 MFC set to  0.000000
8/19/2011	6:30:36 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	6:30:36 PM	Tube furnace set to 0
8/19/2011	6:30:37 PM	Run finished at 6:30 PM
8/19/2011	7:19:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2011	7:19:01 PM	Recipe started at 7:19 PM
8/19/2011	7:19:01 PM	Helium valve closed
8/19/2011	7:19:01 PM	H2 valve closed
8/19/2011	7:19:01 PM	BCl3 valve closed
8/19/2011	7:19:01 PM	PH3 valve closed
8/19/2011	7:19:01 PM	SiCl4 pre valve closed
8/19/2011	7:19:01 PM	SiCl4 post valve closed
8/19/2011	7:19:01 PM	Main Vac valve closed
8/19/2011	7:19:01 PM	Bypass valve closed
8/19/2011	7:19:01 PM	Bubbler valve closed
8/19/2011	7:19:01 PM	Helium MFC set to  0.000000
8/19/2011	7:19:01 PM	H2 MFC set to  0.000000
8/19/2011	7:19:01 PM	BCl3 MFC set to  0.000000
8/19/2011	7:19:01 PM	PHl3 MFC set to  0.000000
8/19/2011	7:19:01 PM	SiCl4 MFC set to  0.000000
8/19/2011	7:19:01 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	7:19:01 PM	Tube furnace set to 0
8/19/2011	7:19:04 PM	H2 valve closed
8/19/2011	7:19:04 PM	BCl3 valve closed
8/19/2011	7:19:04 PM	PH3 valve closed
8/19/2011	7:19:04 PM	SiCl4 pre valve closed
8/19/2011	7:19:04 PM	SiCl4 post valve closed
8/19/2011	7:19:04 PM	Main Vac valve closed
8/19/2011	7:19:04 PM	Bypass valve closed
8/19/2011	7:19:04 PM	Bubbler valve closed
8/19/2011	7:19:04 PM	Helium valve opened
8/19/2011	7:19:04 PM	Helium MFC set to  500.000000
8/19/2011	7:19:04 PM	H2 MFC set to  0.000000
8/19/2011	7:19:04 PM	BCl3 MFC set to  0.000000
8/19/2011	7:19:04 PM	PHl3 MFC set to  0.000000
8/19/2011	7:19:04 PM	SiCl4 MFC set to  0.000000
8/19/2011	7:19:04 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	7:19:04 PM	Tube furnace set to 0
8/19/2011	7:19:09 PM	Helium valve closed
8/19/2011	7:19:09 PM	H2 valve closed
8/19/2011	7:19:09 PM	BCl3 valve closed
8/19/2011	7:19:09 PM	PH3 valve closed
8/19/2011	7:19:09 PM	SiCl4 pre valve closed
8/19/2011	7:19:09 PM	SiCl4 post valve closed
8/19/2011	7:19:09 PM	Main Vac valve closed
8/19/2011	7:19:09 PM	Bypass valve closed
8/19/2011	7:19:09 PM	Bubbler valve closed
8/19/2011	7:19:10 PM	Helium MFC set to  0.000000
8/19/2011	7:19:10 PM	H2 MFC set to  0.000000
8/19/2011	7:19:10 PM	BCl3 MFC set to  0.000000
8/19/2011	7:19:10 PM	PHl3 MFC set to  0.000000
8/19/2011	7:19:10 PM	SiCl4 MFC set to  0.000000
8/19/2011	7:19:10 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	7:19:10 PM	Tube furnace set to 0
8/19/2011	7:19:11 PM	Run finished at 7:19 PM
8/19/2011	7:19:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2011	7:22:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2011	7:22:27 PM	Recipe started at 7:22 PM
8/19/2011	7:22:27 PM	Helium valve closed
8/19/2011	7:22:27 PM	H2 valve closed
8/19/2011	7:22:27 PM	BCl3 valve closed
8/19/2011	7:22:27 PM	PH3 valve closed
8/19/2011	7:22:27 PM	SiCl4 pre valve closed
8/19/2011	7:22:27 PM	SiCl4 post valve closed
8/19/2011	7:22:27 PM	Main Vac valve closed
8/19/2011	7:22:27 PM	Bubbler valve closed
8/19/2011	7:22:27 PM	Bypass valve opened
8/19/2011	7:22:27 PM	Helium MFC set to  0.000000
8/19/2011	7:22:27 PM	H2 MFC set to  0.000000
8/19/2011	7:22:27 PM	BCl3 MFC set to  0.000000
8/19/2011	7:22:27 PM	PHl3 MFC set to  0.000000
8/19/2011	7:22:27 PM	SiCl4 MFC set to  0.000000
8/19/2011	7:22:27 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	7:22:27 PM	Tube furnace set to 0
8/19/2011	7:23:32 PM	Helium valve closed
8/19/2011	7:23:32 PM	H2 valve closed
8/19/2011	7:23:32 PM	BCl3 valve closed
8/19/2011	7:23:32 PM	PH3 valve closed
8/19/2011	7:23:32 PM	SiCl4 pre valve closed
8/19/2011	7:23:32 PM	SiCl4 post valve closed
8/19/2011	7:23:32 PM	Main Vac valve closed
8/19/2011	7:23:32 PM	Bubbler valve closed
8/19/2011	7:23:32 PM	Bypass valve opened
8/19/2011	7:23:32 PM	Helium MFC set to  0.000000
8/19/2011	7:23:32 PM	H2 MFC set to  0.000000
8/19/2011	7:23:32 PM	BCl3 MFC set to  0.000000
8/19/2011	7:23:32 PM	PHl3 MFC set to  0.000000
8/19/2011	7:23:32 PM	SiCl4 MFC set to  0.000000
8/19/2011	7:23:32 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	7:23:32 PM	Tube furnace set to 0
8/19/2011	7:24:32 PM	Helium valve closed
8/19/2011	7:24:32 PM	H2 valve closed
8/19/2011	7:24:32 PM	BCl3 valve closed
8/19/2011	7:24:32 PM	PH3 valve closed
8/19/2011	7:24:32 PM	SiCl4 pre valve closed
8/19/2011	7:24:32 PM	SiCl4 post valve closed
8/19/2011	7:24:32 PM	Bypass valve closed
8/19/2011	7:24:32 PM	Bubbler valve closed
8/19/2011	7:24:32 PM	Main Vac valve opened
8/19/2011	7:24:32 PM	Helium MFC set to  0.000000
8/19/2011	7:24:32 PM	H2 MFC set to  0.000000
8/19/2011	7:24:32 PM	BCl3 MFC set to  0.000000
8/19/2011	7:24:33 PM	PHl3 MFC set to  0.000000
8/19/2011	7:24:33 PM	SiCl4 MFC set to  0.000000
8/19/2011	7:24:33 PM	Bypass solenoid MFC set to  0.000000
8/19/2011	7:24:33 PM	Tube furnace set to 0
8/19/2011	7:24:34 PM	Run finished at 7:24 PM
8/19/2011	7:24:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
